公开(公告)号：US07225674B2

公开(公告)日：2007-06-05

申请号：US10836562

申请日：2004-04-30

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01P15/125

CPC classification number: G01P15/18 ,  B81B5/00 ,  B81B2201/0235 ,  G01P15/125 ,  G02B26/001 ,  G02B26/0841

Abstract: The present invention relates to MicroElectroMechanical Systems (MEMS), devices and applications thereof in which a proof mass is caused to levitate by electrostatic repulsion. Configurations of electrodes are described that result in self-stabilized floating of the proof mass. The electrical properties of the electrodes causing floating, such as currents and/or voltages, typically change in response to environmental perturbations affecting the proof mass. Measuring such currents and/or voltages allow immediate and accurate measurements to be performed related to those perturbations affecting the location and/or the orientation of the proof mass. Additional sensing electrodes can be included to further enhance sensing capabilities. Drive electrodes can also be included that allow forces to be applied to the charged proof mass resulting in a floating, electrically controllable MEMS device. Several applications are described including accelerometers, inertial sensors, resonators and filters for communication devices, gyros, one and two axis mirrors and scanners, among other devices. Several fabrication methods are also described.

Abstract translation: 微电子机械系统（MEMS）技术领域本发明涉及微电子机械系统（MEMS），其装置和应用，其中通过静电排斥使检测质量浮起。 描述了电极的结构，导致校准质量块的自稳定漂浮。 导致浮动的电极（例如电流和/或电压）的电特性通常响应于影响检测质量的环境扰动而改变。 测量这样的电流和/或电压允许即时和精确的测量与影响证明物质的位置和/或取向的那些扰动相关。 可以包括附加的感测电极以进一步增强感测能力。 还可以包括驱动电极，其允许将力施加到带电的质量块上，导致浮动的，可电控制的MEMS器件。 描述了包括用于通信设备的加速度计，惯性传感器，谐振器和滤波器的几个应用，以及其他设备中的陀螺仪，一个和两个轴反射镜和扫描仪。 还描述了几种制造方法。

公开(公告)号：US20150012230A1

公开(公告)日：2015-01-08

申请号：US14324363

申请日：2014-07-07

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01N27/22

CPC classification number: G01N27/22 ,  B81B2201/033 ,  B81C99/003

Abstract: This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for micro- and nano-scale because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonance frequency of one or more test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher accuracy and precision than conventional methods.

Abstract translation: 本发明是用于精密计量，感测和在微尺度和纳米尺度下的致动的新颖方法。 它非常适合微型和纳米级，因为它利用了刻度尺的机电效益。 本发明利用微尺度或纳米级装置的电测量来测量和表征其本身，其他装置以及随后的装置与之相互作用的任何装置。 通过电子测量一个或多个测试结构的电容变化，电压变化和/或谐振频率，可以以比常规方法更高的精度和精度提取多个几何，动态和材料特性。

公开(公告)号：US08429954B2

公开(公告)日：2013-04-30

申请号：US12456759

申请日：2009-06-22

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01B5/28

CPC classification number: G01Q40/00 ,  G01R1/06727

Abstract: A scanning probe microscope includes a plate moveable in an x-axis direction, a y-axis direction, and a z-axis direction, and a probe tip coupled to the plate. A plurality of actuators cooperate to move the probe tip with three degrees of freedom of movement.

Abstract translation: 扫描探针显微镜包括可在x轴方向，y轴方向和z轴方向上移动的板以及与板连接的探针头。 多个致动器协作以三个移动自由度来移动探针尖端。

公开(公告)号：US20120118036A1

公开(公告)日：2012-05-17

申请号：US13271064

申请日：2011-10-11

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01L25/00

CPC classification number: G01Q10/065

Abstract: The present invention generally relates to a system and method for improving the precision and applicability of microscale and nanoscale electromechanical systems. The system includes a device (such as an electrostatic sensor) for measuring parameters of a force associated with noise-induced background readings of a microscale or nanoscale electromechanical system, and a device (such as an electrostatic actuator) for applying a countering force to the electromechanical system.

Abstract translation: 本发明一般涉及一种用于提高微型和纳米级机电系统的精度和适用性的系统和方法。 该系统包括用于测量与微型或纳米级机电系统的噪声引起的背景读数相关联的力的参数的装置（例如静电传感器），以及用于将反作用力施加到 机电系统。

公开(公告)号：US20100192266A1

公开(公告)日：2010-07-29

申请号：US12725919

申请日：2010-03-17

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01Q40/00

CPC classification number: G01Q40/00

Abstract: A self-calibrating apparatus comprises a primary device and a test structure fabricated on an integrated circuit chip. The primary device and the test structure have at least one unknown property due to a fabrication process of the integrated circuit chip. An electrical measurand sensor is configured to measure an electrical measurand of the test structure. A controller coupled to the primary device and electrical measurand sensor. The controller is configured to calculate the at least one unknown property of the test structure based on the measured electrical measurand and use the calculated at least one unknown property to calibrate the primary device.

Abstract translation: 自校准装置包括在集成电路芯片上制造的初级装置和测试结构。 由于集成电路芯片的制造工艺，主要器件和测试结构具有至少一个未知特性。 电测量传感器被配置为测量测试结构的电测量。 耦合到主设备和电测量传感器的控制器。 控制器被配置为基于测量的电测量来计算测试结构的至少一个未知属性，并使用所计算的至少一个未知属性来校准主设备。

公开(公告)号：US20120168233A1

公开(公告)日：2012-07-05

申请号：US13341598

申请日：2011-12-30

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: B62D57/02 ,  H01L41/22 ,  B23P11/00 ,  H01L41/04

CPC classification number: H01L41/094 ,  H01L41/316 ,  Y10T29/42 ,  Y10T74/20305

Abstract: A robot and method of manufacturing the same are disclosed. Embodiments of the robot include robots with piezoelectric appendages and microrobots of very small sizes, for example, robots with appendage lengths equal to approximately 300 μm. Further embodiments include a plurality of piezoelectric appendages, each appendage including a plurality of piezoelectric members coupled to one another at two locations, while other embodiments include appendages with piezoelectric members coupled to one another at three locations. Various embodiments are capable of jumping, walking upside down, carrying heavy loads, and/or walking with foreign object contamination in one or more appendages. Still further embodiments include energy storage members that store the energy generated by an appendage when the appendage is subject to external forces.

Abstract translation: 公开了一种机器人及其制造方法。 机器人的实施例包括具有压电附件的机器人和非常小尺寸的微型机器人，例如附件长度等于大约300μm的机器人。 另外的实施例包括多个压电附件，每个附件包括在两个位置处彼此耦合的多个压电元件，而其他实施例包括具有在三个位置处彼此耦合的压电元件的附件。 各种实施例能够在一个或多个附件中跳跃，上下颠倒，承载重负荷和/或与异物污染一起行走。 另外的实施例包括能量存储构件，其存储当附件受到外力时由附属物产生的能量。

公开(公告)号：US08166796B2

公开(公告)日：2012-05-01

申请号：US12725919

申请日：2010-03-17

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01B3/30

CPC classification number: G01Q40/00

Abstract: A self-calibrating apparatus comprises a primary device and a test structure fabricated on an integrated circuit chip. The primary device and the test structure have at least one unknown property due to a fabrication process of the integrated circuit chip. An electrical measurand sensor is configured to measure an electrical measurand of the test structure. A controller coupled to the primary device and electrical measurand sensor. The controller is configured to calculate the at least one unknown property of the test structure based on the measured electrical measurand and use the calculated at least one unknown property to calibrate the primary device.

Abstract translation: 自校准装置包括在集成电路芯片上制造的初级装置和测试结构。 由于集成电路芯片的制造工艺，主要器件和测试结构具有至少一个未知特性。 电测量传感器被配置为测量测试结构的电测量。 耦合到主设备和电测量传感器的控制器。 控制器被配置为基于测量的电测量来计算测试结构的至少一个未知属性，并使用所计算的至少一个未知属性来校准主设备。

公开(公告)号：US20080100175A1

公开(公告)日：2008-05-01

申请号：US11804177

申请日：2007-05-16

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: H02N1/06 ,  G01P15/125

CPC classification number: G01P15/18 ,  B81B5/00 ,  B81B2201/0235 ,  G01P15/125 ,  G02B26/001 ,  G02B26/0841

Abstract: The present invention relates to MicroElectroMechanical Systems (MEMS), devices and applications thereof in which a proof mass is caused to levitate by electrostatic repulsion. Configurations of electrodes are described that result in self-stabilized floating of the proof mass. The electrical properties of the electrodes causing floating, such as currents and/or voltages, typically change in response to environmental perturbations affecting the proof mass. Measuring such currents and/or voltages allow immediate and accurate measurements to be performed related to those perturbations affecting the location and/or the orientation of the proof mass. Additional sensing electrodes can be included to further enhance sensing capabilities. Drive electrodes can also be included that allow forces to be applied to the charged proof mass resulting in a floating, electrically controllable MEMS device. Several applications are described including accelerometers, inertial sensors, resonators and filters for communication devices, gyros, one and two axis mirrors and scanners, among other devices. Several fabrication methods are also described.

Abstract translation: 微电子机械系统（MEMS）技术领域本发明涉及微电子机械系统（MEMS），其装置和应用，其中通过静电排斥使检测质量浮起。 描述了电极的结构，导致校准质量块的自稳定漂浮。 导致浮动的电极（例如电流和/或电压）的电特性通常响应于影响检测质量的环境扰动而改变。 测量这样的电流和/或电压允许即时和精确的测量与影响证明物质的位置和/或取向的那些扰动相关。 可以包括附加的感测电极以进一步增强感测能力。 还可以包括驱动电极，其允许将力施加到带电的质量块上，导致浮动的，可电控制的MEMS器件。 描述了包括用于通信设备的加速度计，惯性传感器，谐振器和滤波器的几个应用，以及其他设备中的陀螺仪，一个和两个轴反射镜和扫描仪。 还描述了几种制造方法。

公开(公告)号：US08966990B2

公开(公告)日：2015-03-03

申请号：US13371024

申请日：2012-02-10

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01L9/12 ,  H01G5/16 ,  G01P15/125

CPC classification number: H01G5/16 ,  G01P15/125

Abstract: A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and rotor plates and the coupler configured to displace the rotor plates relative to the stator plates providing a variable capacitance dependent on the displacement of the rotor plate.

Abstract translation: 微电子机械系统装置具有第一子组件，其具有包括耦合器的传感器元件和包括梳状驱动器的第二子组件。 梳齿驱动器具有定子板和转子板，并且耦合器构造成相对于定子板移动转子板，提供取决于转子板的位移的可变电容。

公开(公告)号：US08770050B2

公开(公告)日：2014-07-08

申请号：US11378596

申请日：2006-03-17

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01N33/00

CPC classification number: G01N27/22 ,  B81B2201/033 ,  B81C99/003

Abstract: This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for micro- and nano-scale because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonance frequency of one or more test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher accuracy and precision than conventional methods.

Abstract translation: 本发明是用于精密计量，感测和在微尺度和纳米尺度下的致动的新颖方法。 它非常适合微型和纳米级，因为它利用了刻度尺的机电效益。 本发明利用微尺度或纳米级装置的电测量来测量和表征其本身，其他装置以及随后的装置与之相互作用的任何装置。 通过电子测量一个或多个测试结构的电容变化，电压变化和/或谐振频率，可以以比常规方法更高的精度和精度提取多个几何，动态和材料特性。