Dual electro-mechanical oscillator for dynamically reprogrammable logic gate

    公开(公告)号:US11031937B2

    公开(公告)日:2021-06-08

    申请号:US16606436

    申请日:2018-04-17

    Abstract: Embodiments include a logic gate system comprising a first micro-cantilever beam arranged in parallel to a second micro-cantilever beam in which a length of the first micro-cantilever beam is shorter than a length of the second micro-cantilever beam. The first micro-cantilever beam is adjacent to the second micro-cantilever beam and the first micro-cantilever beam is coupled to an input DC bias voltage source to the logic gate system. The second micro-cantilever beam is coupled to an input AC voltage signal that dynamically sets a logic operation of the logic gate system by at least changing an operating resonance frequency for one or more of the first micro-cantilever beam and the second micro-cantilever beam.

    Electromechanical pressure sensor

    公开(公告)号:US11274983B2

    公开(公告)日:2022-03-15

    申请号:US16625521

    申请日:2018-06-15

    Abstract: An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.

    Vapor and/or gas concentration and temperature sensor

    公开(公告)号:US11221311B2

    公开(公告)日:2022-01-11

    申请号:US16982854

    申请日:2019-05-06

    Abstract: A vapor and/or gas concentration and temperature sensor includes a resonating structure having a first side with a functionalized surface and a second side opposite the first side, a first resonant frequency of a first vibration mode, and a second resonating frequency of a second vibration mode. Drive and sensing electrodes face the second side of the resonating structure. A direct current bias source is coupled to the resonating structure. A first AC voltage source provides the resonating structure with a first voltage having a frequency corresponding to the first resonant frequency. A second AC voltage source provides the resonating structure with a second voltage having a frequency corresponding to the second resonant frequency. A read-out circuit determines a vapor and/or gas concentration based on a difference between the frequency of the first voltage and a first read-out frequency and determines a temperature based on a difference between the frequency of the second voltage and a second read-out frequency.

    Wide range highly sensitive pressure sensor based on heated micromachined arch beam

    公开(公告)号:US11703406B2

    公开(公告)日:2023-07-18

    申请号:US17441941

    申请日:2020-04-15

    CPC classification number: G01L9/0019 G01L21/22 G01L9/0008

    Abstract: A device for measuring pressure includes a curved microbeam having opposing ends, a length extending between the pair of opposing ends, and a plurality of resonant frequencies, an actuating electrode extending along the length of the curved microbeam and spaced from the curved microbeam, an AC power source in communication with one of the opposing ends and the actuating electrode to deliver an AC signal at a first symmetric resonant frequency and a second symmetric resonant frequency selected from the plurality of resonant frequencies to the curved microbeam, a DC power source in communication with the opposing ends to pass an electrothermal voltage along a length of the curved microbeam, and a frequency monitoring device to monitor changes in the first symmetric resonant frequency and the second symmetric resonant frequency caused by an ambient pressure surrounding the curved microbeam.

    Combined vapor and/or gas concentration sensor and switch

    公开(公告)号:US11573206B2

    公开(公告)日:2023-02-07

    申请号:US17040099

    申请日:2019-05-06

    Abstract: A combined vapor and/or gas concentration sensor and switch includes a resonating structure, a first alternating current, AC, voltage source coupled to a drive electrode, the first AC voltage source providing the resonating structure with a first voltage having an amplitude causing a first vibration mode of the resonating structure to exhibit a pull-in band and having a first frequency response adjacent to the pull-in band, where the first frequency response is nonlinear, a second AC voltage source coupled to the drive electrode and providing a second voltage having a frequency so that a second frequency response of the resonant structure, adjacent to a third vibration mode, is linear, and a read-out circuit coupled configured to determine a vapor and/or gas concentration based on a difference between (1) the frequency of the second voltage and (2) a frequency obtained by the read-out circuit from the resonating structure.

    MEMS-based passband filter
    7.
    发明授权

    公开(公告)号:US11569796B2

    公开(公告)日:2023-01-31

    申请号:US16627530

    申请日:2017-12-05

    Abstract: A passband filter includes a first and second microelectromechanical resonator system, each including a resonating beam, a drive electrode, and a sense electrode. An AC input signal is coupled to the drive electrode of the first and second microelectromechanical resonator system. A differential-to-single ended amplifier has a first input and second input respectively coupled to the sense electrodes of the first and second microelectromechanical resonator systems. An output of the differential-to-single ended amplifier is an output of the passband filter that provides a bandpass filtered signal of the AC input signal. A DC bias signal is coupled to the resonating beams of the first and second microelectromechanical resonator systems. The first microelectromechanical resonator system exhibits a hardening nonlinear behavior defining an upper stop frequency of the passband and the second microelectromechanical resonator system exhibits a softening nonlinear behavior defining a lower stop frequency of the passband.

    Reprogrammable universal logic device based on MEMS technology

    公开(公告)号:US10355695B2

    公开(公告)日:2019-07-16

    申请号:US15769532

    申请日:2016-12-08

    Abstract: Various examples of reprogrammable universal logic devices are provided. In one example, the device can include a tunable AC input to an oscillator/resonator; a first logic input and a second logic input to the oscillator/resonator, the first and second logic inputs provided by separate DC voltage sources (VA, VB), each of the first and second logic inputs including an on/off switch (A, B); and the oscillator/resonator including an output terminal. The tunable oscillator/resonator can be a MEMS/NEMS resonator. Switching of one or both of the first or second logic inputs on or off in association with the tuning of the AC input can provide logic gate operation. The device can easily be extended to a 3-bit or n-bit device by providing additional logic inputs. Binary comparators and encoders can be implemented using a plurality of oscillators/resonators.

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