公开(公告)号：US09383577B2

公开(公告)日：2016-07-05

申请号：US14403308

申请日：2013-10-11

Applicant: KOREA OPTRON CORP.

Inventor： Kyungsu Kim ,  Junil Kim ,  Jonghyun Lee ,  Seunghwan Moon

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0841 ,  B81B3/0048 ,  B81B2201/033 ,  G02B26/105 ,  G03B21/008 ,  H02N1/008 ,  H04N3/08

Abstract: The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion.

Abstract translation: 微机电系统（MEMS）扫描器技术领域本发明涉及一种微机电系统（MEMS）扫描器，更具体地说，涉及一种MEMS扫描器，用于在使用MEMS工艺增加固定电极和驱动电极之间的驱动角的同时实现稳定的驱动。 MEM扫描器包括下框架，一对上框架，一对杠杆，一对固定电极部分和驱动电极部分。