公开(公告)号：US10228324B2

公开(公告)日：2019-03-12

申请号：US15658470

申请日：2017-07-25

Applicant: MKS Instruments, Inc.

Inventor： Peter Zemek ,  Robert M. Carangelo ,  Hongke Ye ,  Andrew Wright

IPC: G01N21/39 ,  G01N21/01 ,  G01N33/00 ,  G01N21/25

Abstract: Presented herein are systems and methods for quantifying trace and/or ultra-trace levels of a species—for example, H2S or H2O—in a natural gas line. The systems and methods employ a tunable laser, such as a tunable diode laser, vertical-cavity surface-emitting laser (VCSEL), external cavity diode laser or a vertical external-cavity surface-emitting laser (VECSEL) or a tunable quantum cascade laser (QCL). The laser produces an output beam over a set of one or more relatively narrow, high resolution wavelength bands at a scan rate from about 0.1 Hz to about 1000 Hz. A natural gas sample comprising a trace level of a species of interest passes through a flow cell into which the output beam from the laser is guided. An optical detector receives light from the flow cell, producing a signal indicative of the absorption attenuation from which the concentration of the trace species is determined.

公开(公告)号：US20180024051A1

公开(公告)日：2018-01-25

申请号：US15658470

申请日：2017-07-25

Applicant: MKS Instruments, Inc.

Inventor： Peter Zemek ,  Robert M. Carangelo ,  Hongke Ye ,  Andrew Wright

IPC: G01N21/39 ,  G01N21/01 ,  G01N33/00 ,  G01N21/25

CPC classification number: G01N21/39 ,  G01N21/01 ,  G01N21/255 ,  G01N21/3504 ,  G01N33/0044 ,  G01N2021/0193 ,  G01N2021/399 ,  G01N2201/0612 ,  G01N2201/129

Abstract: Presented herein are systems and methods for quantifying trace and/or ultra-trace levels of a species—for example, H2S or H2O—in a natural gas line. The systems and methods employ a tunable laser, such as a tunable diode laser, vertical-cavity surface-emitting laser (VCSEL), external cavity diode laser or a vertical external-cavity surface-emitting laser (VECSEL) or a tunable quantum cascade laser (QCL). The laser produces an output beam over a set of one or more relatively narrow, high resolution wavelength bands at a scan rate from about 0.1 Hz to about 1000 Hz. A natural gas sample comprising a trace level of a species of interest passes through a flow cell into which the output beam from the laser is guided. An optical detector receives light from the flow cell, producing a signal indicative of the absorption attenuation from which the concentration of the trace species is determined.