公开(公告)号：US09726553B2

公开(公告)日：2017-08-08

申请号：US14301921

申请日：2014-06-11

Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： Zeeshan Ahmed ,  Steve Semancik ,  Jacob M Taylor ,  Jingyun Fan ,  Mohammad Hafezi ,  Haitan Xu ,  Gregory Strouse

IPC: G01J5/08 ,  G01J5/44 ,  G01K11/00

CPC classification number: G01K11/00

Abstract: A thermometer includes a substrate; an optical resonator disposed on the substrate and including an optical resonance, the optical resonator being configured to receive a resonant frequency corresponding to the optical resonance; and a waveguide disposed on the substrate proximate to the optical resonator to receive input light, to communicate the resonant frequency to the optical resonator, and to transmit output light; wherein an aperture is interposed between: the substrate and the optical resonator, the substrate and the waveguide, or a combination comprising at least one of the foregoing, and the thermometer is configured to change the optical resonance in response to a change in temperature of the optical resonator.