公开(公告)号：US11774860B2

公开(公告)日：2023-10-03

申请号：US17545134

申请日：2021-12-08

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Yasui ,  Noriaki Nakayamada

IPC: G03F7/20 ,  H01J37/30 ,  H01J37/317 ,  G03F7/00 ,  H01J37/305 ,  H01J37/302

CPC classification number: G03F7/705 ,  G03F7/70025 ,  G03F7/70525 ,  H01J37/3005 ,  H01J37/305 ,  H01J37/3023 ,  H01J37/3177 ,  H01J2237/3174

Abstract: According to the present invention, writing data capable of suppressing a data amount and a calculation amount in a multi charged particle beam writing apparatus is generated from design data including a figure having a curve. The present embodiment relates to a writing data generating method for generating writing data used in a multi charged particle beam writing apparatus. The method includes calculating a pair of curves each representing a curve portion of a figure included in design data, the curves each being defined by a plurality of control points, and generating the writing data by expressing a position of a second control point adjacent in a traveling direction of the curve to a first control point of the plurality of control points as a displacement from the first control point in the traveling direction of the curve and a displacement from the first control point in a direction orthogonal to the traveling direction.

公开(公告)号：US09779913B2

公开(公告)日：2017-10-03

申请号：US15056300

申请日：2016-02-29

Applicant: NuFlare Technology, Inc.

Inventor： Shigehiro Hara ,  Kenichi Yasui ,  Hiroshi Yamashita ,  Yasuo Kato ,  Saori Gomi ,  Shinji Sakamoto ,  Takao Tamura ,  Hideo Tsuchiya ,  Noriaki Nakayamada ,  Hironobu Matsumoto

IPC: H01J37/304 ,  H01J37/20 ,  H01J37/302 ,  H01J37/317

CPC classification number: H01J37/3026 ,  H01J37/3174 ,  H01J2237/31762 ,  H01J2237/31776

Abstract: In one embodiment, a charged particle beam drawing apparatus includes a drawing unit that draws a pattern in a drawing area on a substrate and a control processing circuitry that controls the drawing unit via a process including receiving drawing data with a hierarchical correction map input to the control processing circuitry. The drawing data with the hierarchical map includes a plurality of files in which division maps are respectively described in files in units of subframes. Each division map includes dose correction information associated with corresponding one of blocks of the drawing area. The process further includes generating shot data by performing a data conversion process on the drawing data, reading a division map corresponding to a block in the area to be drawn from the hierarchical correction map, calculating a dose, and controlling the drawing unit based on the shot data and the calculated dose.

公开(公告)号：US11749499B2

公开(公告)日：2023-09-05

申请号：US17412775

申请日：2021-08-26

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Yasui

IPC: H01J37/304

CPC classification number: H01J37/304 ,  H01J2237/30416

Abstract: In one embodiment, a data generation method is for calculating a coverage of a polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with a charged particle beam into predetermined sizes. The method includes dividing a parametric curve that defines a pattern shape into a plurality of parametric curves, calculating, for each of the plurality of parametric curves, an area of a region surrounded by a segment connecting end points among control points of the parametric curve and the parametric curve, calculating positions of vertexes of a figure having an area equivalent to the calculated area and having, as one side thereof, the segment connecting the end points, and generating the polygon by using the vertexes.

公开(公告)号：US10685435B2

公开(公告)日：2020-06-16

申请号：US15380503

申请日：2016-12-15

Applicant: NuFlare Technology, Inc.

Inventor： Shigehiro Hara ,  Kenichi Yasui ,  Noriaki Nakayamada

IPC: H01J37/302 ,  G06T7/00 ,  G06T9/00 ,  H01J37/317 ,  H04N19/423 ,  G06T7/70 ,  G06T7/60

Abstract: A drawing data generating method according to an embodiment is a method for generating drawing data input to a drawing apparatus that draws a plurality of figure patterns on an object using a charged particle beam. The method includes generating the drawing data in accordance with a data format that not only defines a plurality of pieces of figure information, but also sequentially defines dose information of each figure before or after the plurality of pieces of figure information. The dose information of each of the second and succeeding figures is converted to a representation based on the dose information of any preceding figure, and a data length of the dose information is made variable for each figure. For example, the dose information of each of the second and succeeding figures is converted to a difference representation between a dose of the figure and a dose of the preceding figure, and a data length of the difference representation is changed in accordance with the magnitude of a difference value.

公开(公告)号：US10445450B2

公开(公告)日：2019-10-15

申请号：US15691951

申请日：2017-08-31

Applicant: NuFlare Technology, Inc.

Inventor： Shigehiro Hara ,  Kenichi Yasui

IPC: G06F17/50 ,  G06K9/46 ,  G03F1/78 ,  H01J37/302 ,  H01J37/317 ,  G06K9/52

Abstract: In one embodiment, a generating method of drawing data includes generating a pixel map that includes dose amount information on each of pixels obtained by dividing a drawing area on an object into a mesh, extracting, from the pixel map, an island-shaped pixel map which is a group of multiple pixels in which the dose amount information is not zero, determining an order of definition of the dose amount information on the pixels in the island-shaped pixel map, and generating a compressed pixel map including a size of the pixels, information indicating the order of definition, coordinates of a pixel which is first in the order of definition in the island-shaped pixel map, and the dose amount information on the pixels in the island-shaped pixel map, the dose amount information being continuously defined based on the order of definition.

公开(公告)号：US10096452B2

公开(公告)日：2018-10-09

申请号：US15342296

申请日：2016-11-03

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Yasui ,  Shigehiro Hara ,  Shinji Sakamoto

IPC: H01J37/30 ,  H01J37/302 ,  H01J37/317

Abstract: In one embodiment, a data processing method is for creating write data from design data, and registering the write data into a writing apparatus. The method includes applying, to a plurality of pieces of first frame data into which first chip data of the design data is divided, a plurality of conversion processes to create the write data, and applying a plurality of pre-processes to a plurality of pieces of second frame data into which second chip data of the write data is divided, and registering the second chip data into the writing apparatus. The plurality of conversion processes and the plurality of pre-processes are each performed in a pipeline processing on a per-frame basis. The write data is registered into the writing apparatus on a per-chip basis, on a per-virtual chip basis, or on a per-frame basis. The virtual chip includes a plurality of chips combined together.

公开(公告)号：US09846760B2

公开(公告)日：2017-12-19

申请号：US14819931

申请日：2015-08-06

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Yasui

IPC: G06F17/50 ,  H01J37/317 ,  H01J37/302

CPC classification number: G06F17/5081 ,  H01J37/3026 ,  H01J37/3177 ,  H01J2237/31762 ,  H01J2237/31764

Abstract: In one embodiment, a writing data verification method is for verifying a conversion error due to data conversion from first writing data in a vector format based on design data to second writing data in a pixel format. The method includes converting the second writing data to third writing data in a vector format, performing an exclusive OR operation on the first writing data and the third writing data, enlarging a graphic of the first writing data to obtain an enlarged graphic and generating a tolerance region graphic from a difference between the enlarged graphic and the graphic of the first writing data, and detecting a defect by performing a mask process on a graphic generated by the exclusive OR operation with the tolerance region graphic.

公开(公告)号：US11456153B2

公开(公告)日：2022-09-27

申请号：US16831979

申请日：2020-03-27

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Yasui

IPC: H01J37/317 ,  G03F7/20 ,  H01J37/304

Abstract: In one embodiment, a charged particle beam writing method includes dividing a figure pattern defined in writing data into a plurality of shot figures, virtually dividing a writing target substrate into a plurality of mesh regions, and calculating a correction irradiation amount to correct proximity effect and middle range effect for each of the mesh regions based on a position of the figure pattern, calculating an irradiation amount for each of the plurality of shot figures using the correction irradiation amount, calculating an insufficient irradiation amount at an edge portion of the shot figure based on the irradiation amount, resizing the shot figure based on the insufficient irradiation amount, and writing the resized shot figure on the writing target substrate using a charged particle beam in the irradiation amount.

公开(公告)号：US11199781B2

公开(公告)日：2021-12-14

申请号：US16646860

申请日：2018-08-03

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Yasui ,  Noriaki Nakayamada

IPC: G03F7/20 ,  H01J37/30 ,  H01J37/317 ,  H01J37/305 ,  H01J37/302

Abstract: A writing data generating method for generating writing data used in a multi charged particle beam writing apparatus, that can suppress a data amount and a calculation amount in a multi charged particle beam writing apparatus generated from design data including a figure having a curve. The method includes calculating a pair of curves each representing a curve portion of a figure included in design data, the curves each being defined by a plurality of control points, and generating the writing data by expressing a position of a second control point adjacent in a traveling direction of the curve to a first control point of the plurality of control points as a displacement from the first control point in the traveling direction of the curve and a displacement from the first control point in a direction orthogonal to the traveling direction.

公开(公告)号：US20180285505A1

公开(公告)日：2018-10-04

申请号：US15925089

申请日：2018-03-19

Applicant: NuFlare Technology, Inc.

Inventor： Shigehiro Hara ,  Kenichi Yasui ,  Yasuo Kato

IPC: G06F17/50

Abstract: In one embodiment, a method is for creating writing data used in a multi charged particle beam writing apparatus. The method includes partitioning a polygonal figure included in design data into a plurality of trapezoids that each include at least one pair of opposite sides parallel along a first direction and that join so as to be continuous in a second direction orthogonal to the first direction while a side parallel to the first direction serves as a common side, and creating the writing data by, when a first trapezoid, a second trapezoid, and a third trapezoid join along the second direction, representing a position of a common vertex shared by the second trapezoid and the third trapezoid using displacements in the first direction and the second direction from a position of a common vertex shared by the first trapezoid and the second trapezoid. In at least one of the plurality of trapezoids, different dose amounts are defined in the first direction.