公开(公告)号：US20150322589A1

公开(公告)日：2015-11-12

申请号：US14410961

申请日：2013-07-01

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Cihan Yilmaz ,  TaeHoon Kim ,  Sivasubramanian Somu

IPC: C25D13/18 ,  B23K31/00 ,  C25D13/22 ,  C25D13/02 ,  C25D13/12

CPC classification number: C25D13/18 ,  B23K31/00 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C1/00111 ,  B81C2201/0187 ,  C25D3/48 ,  C25D5/02 ,  C25D13/02 ,  C25D13/12 ,  C25D13/22 ,  H01L21/2885 ,  H01L21/76879 ,  H01L21/76885 ,  H01L2221/1094

Abstract: A variety of homogeneous or layered hybrid nanostructures are fabricated by electric field-directed assembly of nanoelements. The nanoelements and the fabricated nanostructures can be conducting, semi-conducting, or insulating, or any combination thereof. Factors for enhancing the assembly process are identified, including optimization of the electric field and combined dielectrophoretic and electrophoretic forces to drive assembly. The fabrication methods are rapid and scalable. The resulting nano structures have electrical and optical properties that render them highly useful in nanoscale electronics, optics, and biosensors.

Abstract translation: 通过纳米元件的电场定向组装制造各种均匀或分层的混合纳米结构。 纳米元件和制造的纳米结构可以是导电，半导电或绝缘或其任何组合。 确定了增强组装过程的因素，包括优化电场和组合介电泳和驱动装配的电泳力。 制造方法是快速和可扩展的。 所得纳米结构具有电和光学性质，使得它们在纳米级电子学，光学和生物传感器中非常有用。

公开(公告)号：US20150371900A1

公开(公告)日：2015-12-24

申请号：US14837227

申请日：2015-08-27

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Cihan Yilmaz ,  TaeHoon Kim ,  Sivasubramanian Somu

IPC: H01L21/768 ,  H01L23/532 ,  H01L23/522

CPC classification number: H01L21/76879 ,  B82Y10/00 ,  B82Y30/00 ,  C25D13/00 ,  H01L21/2885 ,  H01L23/5226 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/53242 ,  H01L23/53257 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.

Abstract translation: 本发明提供了用于从纳米颗粒制造金属纳米棒的快速，可扩展的室温工艺，或者从悬浮在水溶液中的碳纳米管制造金属或半导体纳米棒。 组装的纳米棒适合用作基于CMOS的器件和传感器中的纳米级互连。 通过施加外部电场将金属纳米颗粒或碳纳米管组装成光刻图案化的通孔。 由于纳米棒的尺寸由通孔的尺寸控制，纳米棒尺寸可以缩小到低纳米范围。 水性组合方法是环境友好的，并且可以用于制备使用不同类型的金属颗粒以及半导体和金属纳米管的纳米棒。

公开(公告)号：US09129969B2

公开(公告)日：2015-09-08

申请号：US14570020

申请日：2014-12-15

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Cihan Yilmaz ,  TaeHoon Kim ,  Sivasubramanian Somu

IPC: H01L29/66 ,  H01L21/3205 ,  H01L23/532 ,  H01L21/288 ,  H01L21/768 ,  C25D13/00 ,  B82Y10/00 ,  B82Y30/00

CPC classification number: H01L21/76879 ,  B82Y10/00 ,  B82Y30/00 ,  C25D13/00 ,  H01L21/2885 ,  H01L23/5226 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/53242 ,  H01L23/53257 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.

Abstract translation: 本发明提供了用于从纳米颗粒制造金属纳米棒的快速，可扩展的室温工艺，或者从悬浮在水溶液中的碳纳米管制造金属或半导体纳米棒。 组装的纳米棒适合用作基于CMOS的器件和传感器中的纳米级互连。 通过施加外部电场将金属纳米颗粒或碳纳米管组装成光刻图案化的通孔。 由于纳米棒的尺寸由通孔的尺寸控制，纳米棒尺寸可以缩小到低纳米范围。 水性组合方法是环境友好的，并且可以用于制备使用不同类型的金属颗粒以及半导体和金属纳米管的纳米棒。

公开(公告)号：US11220756B2

公开(公告)日：2022-01-11

申请号：US16131658

申请日：2018-09-14

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Cihan Yilmaz ,  TaeHoon Kim ,  Sivasubramanian Somu

IPC: C25D13/18 ,  C25D13/12 ,  C25D13/22 ,  C25D5/02 ,  C25D13/02 ,  C25D3/48 ,  B23K31/00 ,  B81C1/00 ,  H01L21/768 ,  H01L21/288

Abstract: A variety of homogeneous or layered hybrid nanostructures are fabricated by electric field-directed assembly of nanoelements. The nanoelements and the fabricated nanostructures can be conducting, semi-conducting, or insulating, or any combination thereof. Factors for enhancing the assembly process are identified, including optimization of the electric field and combined dielectrophoretic and electrophoretic forces to drive assembly. The fabrication methods are rapid and scalable. The resulting nanostructures have electrical and optical properties that render them highly useful in nanoscale electronics, optics, and biosensors.

公开(公告)号：US09548242B2

公开(公告)日：2017-01-17

申请号：US14837227

申请日：2015-08-27

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Cihan Yilmaz ,  TaeHoon Kim ,  Sivasubramanian Somu

IPC: H01L21/768 ,  H01L21/288 ,  H01L23/532 ,  C25D13/00 ,  H01L23/522 ,  B82Y10/00 ,  B82Y30/00

CPC classification number: H01L21/76879 ,  B82Y10/00 ,  B82Y30/00 ,  C25D13/00 ,  H01L21/2885 ,  H01L23/5226 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/53242 ,  H01L23/53257 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.

Abstract translation: 本发明提供了用于从纳米颗粒制造金属纳米棒的快速，可扩展的室温工艺，或者从悬浮在水溶液中的碳纳米管制造金属或半导体纳米棒。 组装的纳米棒适合用作基于CMOS的器件和传感器中的纳米级互连。 通过施加外部电场将金属纳米颗粒或碳纳米管组装成光刻图案化的通孔。 由于纳米棒的尺寸由通孔的尺寸控制，纳米棒尺寸可以缩小到低纳米范围。 水性组合方法是环境友好的，并且可以用于制备使用不同类型的金属颗粒以及半导体和金属纳米管的纳米棒。

公开(公告)号：US20150137371A1

公开(公告)日：2015-05-21

申请号：US14570020

申请日：2014-12-15

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Cihan Yilmaz ,  TaeHoon Kim ,  Sivasubramanian Somu

IPC: H01L23/532 ,  C25D13/00 ,  H01L21/768

CPC classification number: H01L21/76879 ,  B82Y10/00 ,  B82Y30/00 ,  C25D13/00 ,  H01L21/2885 ,  H01L23/5226 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/53242 ,  H01L23/53257 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention provides a fast, scalable, room temperature process for fabricating metallic nanorods from nanoparticles or fabricating metallic or semiconducting nanorods from carbon nanotubes suspended in an aqueous solution. The assembled nanorods are suitable for use as nanoscale interconnects in CMOS-based devices and sensors. Metallic nanoparticles or carbon nanotubes are assembled into lithographically patterned vias by applying an external electric field. Since the dimensions of nanorods are controlled by the dimensions of vias, the nanorod dimensions can be scaled down to the low nanometer range. The aqueous assembly process is environmentally friendly and can be used to make nanorods using different types of metallic particles as well as semiconducting and metallic nanotubes.