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公开(公告)号：US09553423B2
公开(公告)日：2017-01-24
申请号：US15055589
申请日：2016-02-27
Applicant: Princeton Optronics Inc.
Inventor： Tong Chen , Chuni L Ghosh , Jean-Francois Seurin , Laurence S Watkins
CPC classification number: H01S5/005 , H01S5/02276 , H01S5/026 , H01S5/18308 , H01S5/18311 , H01S5/18388 , H01S5/2063 , H01S5/2072 , H01S5/423 , H04N5/2254 , H04N13/204 , H04N13/207 , H04N13/254 , H04N13/296
Abstract: A miniature structured light illuminator is provided. The miniature structured light illuminator uses a semiconductor surface emitting array including VCSEL or RC-LED array and an array of microlens elements to generate a wide range of structured light illumination patterns. The emission beam from a surface emitter array may be selectively directed, steered, focused or expanded, by applying a lateral displacement of the microlens array, such that centers of the emission beam and microlens array are misaligned. Emitted beams may be directed through small optical components to project the structured light pattern to a distant plane. The surface emitting arrays may be configured in addressable form to be activated separately for continuous or pulsed operation with very fast pulses having
Abstract translation: 提供微型结构光照明器。 微型结构光照射器使用包括VCSEL或RC-LED阵列的半导体表面发射阵列和微透镜元件阵列以产生宽范围的结构光照度图案。 可以通过施加微透镜阵列的横向位移来选择性地引导，转向，聚焦或扩展来自表面发射器阵列的发射光束，使得发射光束和微透镜阵列的中心不对准。 发射光束可以被引导通过小的光学部件，以将结构化光图案投影到远处的平面。 表面发射阵列可以被配置成可寻址的形式，以使具有<100ps上升时间的非常快的脉冲进行连续或脉冲操作。 具有投影光学元件的紧凑型结构光照射器模块以非常小的物理尺寸（〜6×6×3 mm3）提供，适合在手持设备中配置。
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公开(公告)号：US09520696B2
公开(公告)日：2016-12-13
申请号：US14634902
申请日：2015-03-02
Applicant: Princeton Optronics Inc.
Inventor： Qing Wang , Jean-Francois Seurin , Chuni L Ghosh , Laurence S Watkins
CPC classification number: H01S5/0224 , H01L2224/48091 , H01L2224/73265 , H01S5/0203 , H01S5/0217 , H01S5/0425 , H01S5/18305 , H01S5/18311 , H01S5/18347 , H01S5/423 , H01L2924/00014
Abstract: A set of VCSEL fabrication methods has been invented which enhance the performance and long time reliability of VCSEL devices and arrays of devices. Wafer bow caused by growing a large number of epitaxial layers required to fabricate VCSEL device generates strain and results in bowing/warping of the device wafer. The stress so generated is eliminated by applying a stress compensation layer on the substrate to a surface opposite to the epitaxial layer surface. New oxidation equipment designs and process parameters are described which produce more precision apertures and reduce stress in the VCSEL device. An ultrathin fabrication procedure is described which enables high power VCSELs to be made for high power operation at many different wavelengths. A low temperature electrical contacting process improves VCSEL long term reliability.
Abstract translation: 已经发明了一组VCSEL制造方法，其增强了VCSEL器件和器件阵列的性能和长时间的可靠性。 通过生长制造VCSEL器件所需的大量外延层引起的晶片弓产生应变并导致器件晶片的弯曲/翘曲。 通过在衬底上施加应力补偿层到与外延层表面相对的表面来消除所产生的应力。 描述了新的氧化设备设计和工艺参数，其产生更精确的孔并减少VCSEL装置中的应力。 描述了一种超薄制造程序，其使得能够在许多不同波长下进行高功率操作的高功率VCSEL。 低温电接触工艺可提高VCSEL的长期可靠性。
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公开(公告)号：US20140333995A1
公开(公告)日：2014-11-13
申请号：US14341239
申请日：2014-07-25
Applicant: Princeton Optronics Inc.
Inventor： Jean-Francois Seurin , Qing Wang , Laurence Watkins , Chuni Lal Ghosh
CPC classification number: H01S5/50 , H01S3/0675 , H01S3/06754 , H01S3/091 , H01S3/094007 , H01S3/094053 , H01S3/09415 , H01S3/10 , H01S3/1068 , H01S3/11 , H01S3/235 , H01S5/005 , H01S5/02208 , H01S5/02284 , H01S5/026 , H01S5/141 , H01S5/183 , H01S5/18305 , H01S5/4012 , H01S5/423
Abstract: Optical pump modules comprising VCSEL and VCSEL array devices provide high optical power for configuring fiber optic gain systems such as fiber laser and fiber amplifier particularly suited for high power operation. Pump modules may be constructed using two reflector or three reflector VCSEL devices optionally integrated with microlens arrays and other optical components, to couple high power pump beams to an optical fiber output port, particularly suited to couple light to an inner cladding of a double-clad fiber suitable for a high power gain element. Multiple-pumps may be combined to increase pump power in a modular fashion without significant distortion to signal, particularly for short pulse operation. The pump modules may be operated in CW, QCW and pulse modes to configure fiber lasers and amplifiers using single end, dual end, and regenerative optical pumping modes.
Abstract translation: 包括VCSEL和VCSEL阵列器件的光泵模块提供高光功率，用于配置光纤增益系统，如光纤激光器和光纤放大器，特别适用于大功率操作。 可以使用可选地与微透镜阵列和其他光学部件集成的两个反射器或三个反射器VCSEL器件来构造泵模块，以将高功率泵浦光束耦合到光纤输出端口，特别适合于将光耦合到双包层的内包层 光纤适合高功率增益元件。 可以组合多泵以模块化方式增加泵功率，而不会对信号造成明显的失真，特别是对于短脉冲操作。 泵模块可以以CW，QCW和脉冲模式运行，以使用单端，双端和再生光泵浦模式配置光纤激光器和放大器。
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公开(公告)号：US11527868B2
公开(公告)日：2022-12-13
申请号：US16640119
申请日：2018-08-21
Applicant: Princeton Optronics, Inc.
Inventor： Chuni Ghosh , Jean-Francois Seurin , Laurence Watkins , Guoyang Xu
IPC: H01S5/042 , H01S5/42 , H01S5/02345 , H01S5/183 , H01S5/40
Abstract: A multilayer interconnect is described which enables electrically connecting a complex distribution of VCSEL or other light emitter elements in a large high density addressable array. The arrays can include many groups of VCSEL elements interspersed among each other to form a structured array. Each group can be connected to a contact pad so that each group of light emitter elements can be activated separately.
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公开(公告)号：US20200350175A1
公开(公告)日：2020-11-05
申请号：US16956994
申请日：2019-01-14
Applicant: Princeton Optronics, Inc.
Inventor： Guoyang XU , Jean-Francois Seurin , Chuni Ghosh
IPC: H01L21/285 , H01L29/45 , H01L21/324 , H01S5/042
Abstract: Ohmic contacts, including materials and processes for forming n-type ohmic contacts on n-type semiconductor substrates at low temperatures, are disclosed. Materials include reactant layers, n-type dopant layers, capping layers, and in some instances, adhesion layers. The capping layers can include metal layers and diffusion barrier layers. Ohmic contacts can be formed on n-type semiconductor substrates at temperatures between 150 and 250° C., and can resist degradation during operation.
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Patent Agency Ranking
公开(公告)号：US20160072258A1
公开(公告)日：2016-03-10
申请号：US14848791
申请日：2015-09-09
Applicant: Princeton Optronics Inc.
Inventor： Jean-Francois Seurin , Chuni L. Ghosh , Tong Chen , Laurence S. Watkins
CPC classification number: H04N13/204 , G01B11/2513 , G06K9/00134 , G06K9/0014 , G06K9/00147 , G06K9/00335 , G06K9/52 , G06K2209/05 , H01S5/02276 , H01S5/026 , H01S5/18308 , H01S5/18311 , H01S5/2063 , H01S5/2072 , H01S5/423
Abstract: A structured light source comprising VCSEL arrays is configured in many different ways to project a structured illumination pattern into a region for 3 dimensional imaging and gesture recognition applications. One aspect of the invention describes methods to construct densely and ultra-densely packed VCSEL arrays with to produce high resolution structured illumination pattern. VCSEL arrays configured in many different regular and non-regular arrays together with techniques for producing addressable structured light source are extremely suited for generating structured illumination patterns in a programmed manner to combine steady state and time-dependent detection and imaging for better accuracy. Structured illumination patterns can be generated in customized shapes by incorporating differently shaped current confining apertures in VCSEL devices. Surface mounting capability of densely and ultra-densely packed VCSEL arrays are compatible for constructing compact on-board 3-D imaging and gesture recognition systems.
Abstract translation: 包括VCSEL阵列的结构化光源以许多不同的方式配置以将结构化照明图案投影到用于三维成像和手势识别应用的区域中。 本发明的一个方面描述了构建密集和超密集VCSEL阵列以产生高分辨率结构照明图案的方法。 配置在许多不同规则和非规则阵列中的VCSEL阵列以及用于产生可寻址结构光源的技术非常适合以编程方式生成结构化照明模式，以结合稳态和时间相关检测和成像以获得更高的精度。 可以通过在VCSEL设备中引入不同形状的电流限制孔径，以定制的形状生成结构化的照明图案。 密集和超密集VCSEL阵列的表面贴装能力与构建紧凑型板载3-D成像和手势识别系统相兼容。
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公开(公告)号：US20140247841A1
公开(公告)日：2014-09-04
申请号：US13783172
申请日：2013-03-01
Applicant: Princeton Optronics Inc.
Inventor： Jean-Francois Seurin , Qing Wang , Laurence Watkins , Chuni Lal Ghosh
IPC: H01S3/067
CPC classification number: H01S5/50 , H01S3/0675 , H01S3/06754 , H01S3/091 , H01S3/094007 , H01S3/094053 , H01S3/09415 , H01S3/10 , H01S3/1068 , H01S3/11 , H01S3/235 , H01S5/005 , H01S5/02208 , H01S5/02284 , H01S5/026 , H01S5/141 , H01S5/183 , H01S5/18305 , H01S5/4012 , H01S5/423
Abstract: Optical pump modules comprising VCSEL and VCSEL array devices provide high optical power for configuring fiber optic gain systems such as fiber laser and fiber amplifier particularly suited for high power operation. Pump modules may be constructed using two reflector or three reflector VCSEL devices optionally integrated with microlens arrays and other optical components, to couple high power pump beams to a fiber output port. The pump module having a fiber output port is particularly suited to couple light to an inner cladding of a double-clad fiber, often used to configure high power fiber laser and fiber amplifier. The pump modules may be operated in CW, QCW and pulse modes to configure fiber lasers and amplifiers using single end, dual end, and regenerative optical pumping modes. Multiple-pumps may be combined to increase pump power in a modular fashion without significant distortion to signal, particularly for short pulse operation.
Abstract translation: 包括VCSEL和VCSEL阵列器件的光泵模块提供高光功率，用于配置光纤增益系统，如光纤激光器和光纤放大器，特别适用于大功率操作。 可以使用可选地与微透镜阵列和其它光学部件集成的两个反射器或三个反射器VCSEL装置来构造泵模块，以将高功率泵浦光束耦合到光纤输出端口。 具有光纤输出端口的泵模块特别适用于将光耦合到双包层光纤的内包层，通常用于配置大功率光纤激光器和光纤放大器。 泵模块可以以CW，QCW和脉冲模式运行，以使用单端，双端和再生光泵浦模式配置光纤激光器和放大器。 可以组合多泵以模块化方式增加泵功率，而不会对信号造成明显的失真，特别是对于短脉冲操作。
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公开(公告)号：US08824519B1
公开(公告)日：2014-09-02
申请号：US13783172
申请日：2013-03-01
Applicant: Princeton Optronics Inc.
Inventor： Jean-Francois Seurin , Qing Wang , Laurence Watkins , Chuni Lal Ghosh
CPC classification number: H01S5/50 , H01S3/0675 , H01S3/06754 , H01S3/091 , H01S3/094007 , H01S3/094053 , H01S3/09415 , H01S3/10 , H01S3/1068 , H01S3/11 , H01S3/235 , H01S5/005 , H01S5/02208 , H01S5/02284 , H01S5/026 , H01S5/141 , H01S5/183 , H01S5/18305 , H01S5/4012 , H01S5/423
Abstract: Optical pump modules comprising VCSEL and VCSEL array devices provide high optical power for configuring fiber optic gain systems such as fiber laser and fiber amplifier particularly suited for high power operation. Pump modules may be constructed using two reflector or three reflector VCSEL devices optionally integrated with microlens arrays and other optical components, to couple high power pump beams to a fiber output port. The pump module having a fiber output port is particularly suited to couple light to an inner cladding of a double-clad fiber, often used to configure high power fiber laser and fiber amplifier. The pump modules may be operated in CW, QCW and pulse modes to configure fiber lasers and amplifiers using single end, dual end, and regenerative optical pumping modes. Multiple-pumps may be combined to increase pump power in a modular fashion without significant distortion to signal, particularly for short pulse operation.
Abstract translation: 包括VCSEL和VCSEL阵列器件的光泵模块提供高光功率，用于配置光纤增益系统，如光纤激光器和光纤放大器，特别适用于大功率操作。 可以使用可选地与微透镜阵列和其它光学部件集成的两个反射器或三个反射器VCSEL装置来构造泵模块，以将高功率泵浦光束耦合到光纤输出端口。 具有光纤输出端口的泵模块特别适用于将光耦合到双包层光纤的内包层，通常用于配置大功率光纤激光器和光纤放大器。 泵模块可以以CW，QCW和脉冲模式运行，以使用单端，双端和再生光泵浦模式配置光纤激光器和放大器。 可以组合多泵以模块化方式增加泵功率，而不会对信号造成明显的失真，特别是对于短脉冲操作。
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公开(公告)号：US11195721B2
公开(公告)日：2021-12-07
申请号：US16956994
申请日：2019-01-14
Applicant: Princeton Optronics, Inc.
Inventor： Guoyang Xu , Jean-Francois Seurin , Chuni Ghosh
IPC: H01L21/285 , H01L21/324 , H01L29/45 , H01S5/042 , H01S5/183 , H01L21/768
Abstract: Ohmic contacts, including materials and processes for forming n-type ohmic contacts on n-type semiconductor substrates at low temperatures, are disclosed. Materials include reactant layers, n-type dopant layers, capping layers, and in some instances, adhesion layers. The capping layers can include metal layers and diffusion barrier layers. Ohmic contacts can be formed on n-type semiconductor substrates at temperatures between 150 and 250° C., and can resist degradation during operation.
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公开(公告)号：US20210218231A1
公开(公告)日：2021-07-15
申请号：US16640119
申请日：2018-08-21
Applicant: Princeton Optronics, Inc.
Inventor： Chuni Ghosh , Jean-Francois Seurin , Laurence Watkins , Guoyang XU
IPC: H01S5/42 , H01S5/02345 , H01S5/183
Abstract: A multilayer interconnect is described which enables electrically connecting a complex distribution of VCSEL or other light emitter elements in a large high density addressable array. The arrays can include many groups of VCSEL elements interspersed among each other to form a structured array. Each group can be connected to a contact pad so that each group of light emitter elements can be activated separately.
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