公开(公告)号：US20170176186A1

公开(公告)日：2017-06-22

申请号：US15454220

申请日：2017-03-09

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shigehiro Yoshiuchi ,  Satoshi Ohuchi ,  Tsuyoshi Fujii ,  Kensaku Yamamoto ,  Hideo Ohkoshi

IPC: G01C19/5769 ,  B81B7/00

CPC classification number: G01C19/5769 ,  B81B7/0048 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2207/07 ,  B81C1/0023 ,  B81C1/00238 ,  G01P15/0802 ,  H01L24/32 ,  H01L41/1132 ,  H01L2224/32145 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2225/06506 ,  H01L2924/01014 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/00014

Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).

公开(公告)号：US20150192602A1

公开(公告)日：2015-07-09

申请号：US14660353

申请日：2015-03-17

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shigehiro Yoshiuchi ,  Satoshi Ohuchi ,  Tsuyoshi Fujii ,  Kensaku Yamamoto ,  Hideo Ohkoshi

IPC: G01P15/08

CPC classification number: G01C19/5769 ,  B81B7/0048 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2207/07 ,  B81C1/0023 ,  B81C1/00238 ,  G01P15/0802 ,  H01L24/32 ,  H01L41/1132 ,  H01L2224/32145 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2225/06506 ,  H01L2924/01014 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/00014

Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).

Abstract translation: 即使向惯性力传感器施加外部应力也能够抑制检测灵敏度的波动的惯性力传感器。 角速度传感器（1）即惯性力传感器包括陶瓷基板（6），粘合剂（11a和11b）（第一粘合剂）和传感器元件（2）附着在陶瓷基板（6）上的下盖 ）用粘合剂（10a和10b）（第二粘合剂）粘附到下盖（4）上。 粘合剂（11a和11b）的弹性模量小于粘合剂（10a和10b）的弹性模量。

公开(公告)号：US10031154B2

公开(公告)日：2018-07-24

申请号：US15667178

申请日：2017-08-02

Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

Inventor： Isao Hattori ,  Takeshi Uemura ,  Satoshi Ohuchi ,  Yasunobu Tsukio

IPC: G01P15/18 ,  G01P15/08 ,  G01C19/5776 ,  G01P15/125 ,  G01P15/135 ,  G01P15/03

Abstract: An inertial force sensor has a first sensor element, a second sensor element, a first signal processor, a second signal processor, and a power controller. The first sensor element converts a first inertial force to an electric signal, and the second sensor element converts a second inertial force to an electric signal. The first signal processor is connected to the first sensor element, and outputs a first inertial force value. The second signal processor is connected to the second sensor element, and outputs a second inertial force value. The power controller is connected to the first signal processor and the second signal processor, and changes power supplied to the second signal processor based on the first inertial force value.

公开(公告)号：US20170131100A1

公开(公告)日：2017-05-11

申请号：US15416341

申请日：2017-01-26

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Jiro Terada ,  Takami Ishida ,  Ichirou Satou ,  Hideo Ohkoshi ,  Yohei Ashimori

IPC: G01C19/5642

CPC classification number: G01C19/5642 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/574 ,  G01P15/097 ,  G01P15/18

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

公开(公告)号：US10408618B2

公开(公告)日：2019-09-10

申请号：US15416341

申请日：2017-01-26

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Jiro Terada ,  Takami Ishida ,  Ichirou Satou ,  Hideo Ohkoshi ,  Yohei Ashimori

IPC: G01C19/56 ,  G01C19/5642 ,  G01C19/5607 ,  G01P15/097 ,  G01P15/18 ,  G01C19/574

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.