公开(公告)号：US09784888B2

公开(公告)日：2017-10-10

申请号：US14434697

申请日：2013-10-09

Applicant: Purdue Research Foundation

Inventor： Gururaj Naik ,  Bivas Saha ,  Timothy Sands ,  Vladimir Shalaev ,  Alexandra Boltasseva

IPC: G02B1/00 ,  G02B5/00 ,  B32B9/00 ,  H01L51/52 ,  B82Y20/00

CPC classification number: G02B1/002 ,  B32B9/00 ,  B82Y20/00 ,  G02B5/008 ,  H01L51/5262 ,  Y10S977/761 ,  Y10T428/24975

Abstract: A titanium nitride-based metamaterial, and method for producing the same, is disclosed, consisting of ultrathin, smooth, and alternating layers of a plasmonic titanium nitride (TiN) material and a dielectric material, grown on a substrate to form a superlattice. The dielectric material is made of A1-xScxN, where ‘x’ ranges in value from 0.2 to 0.4. The layers of alternating material have sharp interfaces, and each layer can range from 1-20 nanometers in thickness. Metamaterials based on titanium TiN, a novel plasmonic building block, have many applications including, but not ‘limited to emission enhancers, computer security, etc. The use of nitrogen vacancy centers in diamond, and light emitting diode (LED) efficiency enhancement is of particular interest.