公开(公告)号：US10196685B2

公开(公告)日：2019-02-05

申请号：US15310775

申请日：2015-05-12

Applicant: RASIRC, INC.

Inventor： Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman ,  Russell J. Holmes ,  Edward Heinlein ,  Zohreh Shamsi ,  Christopher Ramos ,  Alex Deptala ,  James Hogan

IPC: A61L2/00 ,  A61L9/00 ,  B01D47/02 ,  C12Q1/6848 ,  A61L2/20 ,  C12Q1/6806 ,  A61L2/18

Abstract: Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.