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公开(公告)号:US10214420B2
公开(公告)日:2019-02-26
申请号:US15520031
申请日:2015-10-22
Applicant: RASIRC, Inc.
Inventor: Daniel Alvarez, Jr. , Russell J. Holmes , Jeffrey Spiegelman , Edward Heinlein , Christopher Ramos
Abstract: A method and chemical delivery system and device are provided. One method includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a gas stream comprising hydrazine to a critical process or application. One chemical delivery system and device includes a non-aqueous hydrazine solution having a vapor phase that is in contact with a carrier gas and/or vacuum. One device includes a chamber for containing a liquid comprising at least one volatile process chemical, such as a non-aqueous hydrazine solution, a hydrogen peroxide solution, or another suitable process chemical, and a head space from which the volatile can be drawn using a carrier gas and/or vacuum. Another method useful in the present invention involves drawing a process chemical from a device as a disclosed herein using a carrier or vacuum and delivering the process chemical to a critical process or application.
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公开(公告)号:US09610550B2
公开(公告)日:2017-04-04
申请号:US14387872
申请日:2013-03-14
Applicant: RASIRC, Inc.
Inventor: Daniel Alvarez, Jr. , Jeffrey Spiegelman , Russell J. Holmes , Edward Heinlein , Zohreh Shamsi
IPC: B01D53/22 , B01F3/02 , C23C16/448 , B01D61/24 , B01D63/02
CPC classification number: B01F3/02 , B01D53/228 , B01D61/246 , B01D63/02 , B01D2258/0216 , C23C16/4481 , Y10T137/0391 , Y10T137/2931
Abstract: A method and chemical delivery system are provided. The method includes providing a vapor phase of a multi-component liquid source. The method further includes contacting a pre-loaded carrier gas with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the multi-component liquid source and delivering a gas stream comprising at least one component of the liquid source to a critical process or application, wherein the amount of the component in the carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. The chemical delivery system includes a multi-component liquid source having a vapor phase. The system further includes a pre-loaded carrier gas source that is in fluid contact with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the liquid source and an apparatus for delivering a gas stream including at least one component of the liquid source, wherein the amount of the component in the pre-loaded carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant.
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公开(公告)号:US11635170B2
公开(公告)日:2023-04-25
申请号:US16764308
申请日:2018-11-16
Applicant: RASIRC, Inc.
Inventor: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
Abstract: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US11634816B2
公开(公告)日:2023-04-25
申请号:US16890875
申请日:2020-06-02
Applicant: RASIRC, Inc.
Inventor: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
Abstract: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US11359292B2
公开(公告)日:2022-06-14
申请号:US17447016
申请日:2021-09-07
Applicant: RASIRC, Inc.
Inventor: Jeffrey J. Spiegelman , Daniel Alvarez, Jr.
IPC: C23F11/18
Abstract: The present disclosure provides techniques for suppression of hydrogen degradation. In some embodiments, a method for decreasing the amount or rate of hydrogen degradation of a material, includes: (a) exposing a material to gaseous hydrogen peroxide; (b) forming a hydroxyl layer on the surface of the material within a chamber; and (c) after forming the hydroxyl layer, exposing the material to hydrogen during a controlled process or application.
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公开(公告)号:US10766771B2
公开(公告)日:2020-09-08
申请号:US15564395
申请日:2016-04-06
Applicant: RASIRC, Inc.
Inventor: Daniel Alvarez, Jr. , Christopher Ramos , Jeffrey J. Spiegelman
IPC: C01B15/013 , B01J47/12 , B01J39/20 , B01J49/53 , B01J3/00 , B01J39/18 , B01J47/02 , C01B15/017 , C08L81/08
Abstract: Compositions, methods, devices, and systems for purifying a source liquid from a replenishment stock solution that includes stabilizing agents, such as metal ions, prior to vaporization. Certain embodiments effect the purification with a solid perfluoronated ionomer, such as a perfluoronated ionomer membrane. Advantageously, source liquids purified in this manner provide feed stocks for production of ultra-pure gaseous reagents. As well, performance characteristics of membrane-based vaporizers relying on transport processes are improved.
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公开(公告)号:US20150329901A1
公开(公告)日:2015-11-19
申请号:US14710521
申请日:2015-05-12
Applicant: RASIRC, Inc.
Inventor: Daniel Alvarez, Jr. , Jeffrey J. Spiegelman , Russell J. Holmes , James Hogan
CPC classification number: C12Q1/6848 , A61L2/186 , A61L2/208 , A61L2202/24 , C12Q1/6806 , C12Q2527/125
Abstract: Methods, systems, and devices for decontaminating materials containing biological or biologically derived materials, such as microorganisms or DNA products, are provided. The methods, systems, and devices may be used for decontaminating or sterilizing materials, such as surfaces, including, but not limited to reducing the number of viable microorganisms on surfaces. The methods, systems, and devices may further be used for rendering DNA non-amplifiable in nucleic acid amplification reactions that synthesize DNA amplification products.
Abstract translation: 提供了用于净化含有生物或生物衍生物质如微生物或DNA产物的材料的方法,系统和装置。 方法,系统和装置可以用于对诸如表面的材料进行净化或灭菌,包括但不限于减少表面上活的微生物的数量。 方法,系统和装置可进一步用于在合成DNA扩增产物的核酸扩增反应中使DNA不可扩增。
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公开(公告)号:US20200291520A1
公开(公告)日:2020-09-17
申请号:US16890875
申请日:2020-06-02
Applicant: RASIRC, Inc.
Inventor: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
IPC: C23C16/455 , C09K13/00 , F17C11/00
Abstract: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US11634815B2
公开(公告)日:2023-04-25
申请号:US16880184
申请日:2020-05-21
Applicant: RASIRC, Inc.
Inventor: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
Abstract: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US10196685B2
公开(公告)日:2019-02-05
申请号:US15310775
申请日:2015-05-12
Applicant: RASIRC, INC.
Inventor: Daniel Alvarez, Jr. , Jeffrey J. Spiegelman , Russell J. Holmes , Edward Heinlein , Zohreh Shamsi , Christopher Ramos , Alex Deptala , James Hogan
IPC: A61L2/00 , A61L9/00 , B01D47/02 , C12Q1/6848 , A61L2/20 , C12Q1/6806 , A61L2/18
Abstract: Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.
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