公开(公告)号：US20150130069A1

公开(公告)日：2015-05-14

申请号：US14538367

申请日：2014-11-11

Applicant: REGENTS OF THE UNIVERSITY OF MINNESOTA

Inventor： Ankit Mahajan ,  Carl Daniel Frisbie ,  Lorraine F. Francis

IPC: H01L23/528 ,  H01L21/768

CPC classification number: H01L21/76834 ,  C23C18/1608 ,  C23C18/2006 ,  C23C18/30 ,  C23C18/405 ,  H01L21/4867 ,  H01L21/6835 ,  H01L21/76879 ,  H01L21/76882 ,  H01L27/1285 ,  H01L27/1292 ,  H01L29/0673 ,  H01L29/0676 ,  H01L29/78693 ,  H01L29/78696 ,  H01L31/0392 ,  H01L51/0005 ,  H01L51/0036 ,  H01L51/0037 ,  H01L51/0048 ,  H01L51/0545 ,  H05K1/162 ,  H05K1/167 ,  H05K3/107 ,  H05K3/1258 ,  H05K3/182 ,  H05K2201/09036 ,  H05K2203/0709

Abstract: A manufacturing process, which we term Self-Aligned Capillarity-Assisted Lithography for manufacturing devices having nano-scale or micro-scale features, such as flexible electronic circuits, is described.

Abstract translation: 描述了一种制造工艺，我们将其称为自对准毛细管辅助光刻技术用于制造具有纳米尺度或微尺度特征的器件，例如柔性电子电路。

公开(公告)号：US09401306B2

公开(公告)日：2016-07-26

申请号：US14538367

申请日：2014-11-11

Applicant: REGENTS OF THE UNIVERSITY OF MINNESOTA

Inventor： Ankit Mahajan ,  Carl Daniel Frisbie ,  Lorraine F. Francis

IPC: H01L21/44 ,  H01L21/768 ,  H01L29/06 ,  H01L21/683 ,  H01L31/0392 ,  H01L27/12 ,  H01L29/786 ,  H01L21/48

CPC classification number: H01L21/76834 ,  C23C18/1608 ,  C23C18/2006 ,  C23C18/30 ,  C23C18/405 ,  H01L21/4867 ,  H01L21/6835 ,  H01L21/76879 ,  H01L21/76882 ,  H01L27/1285 ,  H01L27/1292 ,  H01L29/0673 ,  H01L29/0676 ,  H01L29/78693 ,  H01L29/78696 ,  H01L31/0392 ,  H01L51/0005 ,  H01L51/0036 ,  H01L51/0037 ,  H01L51/0048 ,  H01L51/0545 ,  H05K1/162 ,  H05K1/167 ,  H05K3/107 ,  H05K3/1258 ,  H05K3/182 ,  H05K2201/09036 ,  H05K2203/0709

Abstract: A manufacturing process, which we term Self-Aligned Capillarity-Assisted Lithography for manufacturing devices having nano-scale or micro-scale features, such as flexible electronic circuits, is described.

Abstract translation: 描述了一种制造工艺，我们将其称为自对准毛细管辅助光刻技术用于制造具有纳米尺度或微尺度特征的器件，例如柔性电子电路。