公开(公告)号：US20140253166A1

公开(公告)日：2014-09-11

申请号：US14282565

申请日：2014-05-20

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： Gary Mark Gunderson ,  Greg Olmstead

IPC: G01R1/04

CPC classification number: G01R1/04 ,  G01R31/2891

Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.

Abstract translation: 通过本机构检查半导体或类似基板可以最大限度地减少检查板和探针卡中的偏转。 一种检查装置，包括壳体，壳体内的肘节组件，附接在肘节组件内的物镜组件，其包括联接在物镜焦点内的物镜，其中物镜焦点可沿光学轴线偏转;以及凸轮组件，包括旋转 凸轮和窗户托架，其中所述窗口托架可随着所述旋转凸轮的旋转沿着所述光学轴线移动，其中所述凸轮组件联接到所述肘节组件，所述物镜和所述窗口沿着所述光学轴线对准。

公开(公告)号：US09535089B2

公开(公告)日：2017-01-03

申请号：US14282565

申请日：2014-05-20

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： Gary Mark Gunderson ,  Greg Olmstead

IPC: G01R31/00 ,  G01R1/04 ,  G01R31/28

CPC classification number: G01R1/04 ,  G01R31/2891

Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.

Abstract translation: 通过本机构检查半导体或类似基板可以最大限度地减少检查板和探针卡中的偏转。 一种检查装置，包括壳体，壳体内的肘节组件，附接在肘节组件内的物镜组件，其包括联接在物镜焦点内的物镜，其中物镜焦点可沿光学轴线偏转;以及凸轮组件，包括旋转 凸轮和窗户托架，其中所述窗口托架可随着所述旋转凸轮的旋转沿着所述光学轴线移动，其中所述凸轮组件联接到所述肘节组件，所述物镜和所述窗口沿着所述光学轴线对准。