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Patent Agency Ranking
1.发明申请公开(公告)号：US20150054534A1
公开(公告)日：2015-02-26
申请号：US14298539
申请日：2014-06-06
Applicant: Rudolph Technologies, Inc.
Inventor： Greg Olmstead
CPC classification number: G01R35/00 , G01R31/2891
Abstract: A method of assessing functionality of a probe card includes providing a probe card analyzer without a probe card interface, removably coupling a probe card having probes to a support plate of the probe card analyzer, aligning a sensor head of the probe card analyzer with the probe card, and measuring a component of the probes with the sensor head.
Abstract translation: 一种评估探针卡的功能的方法包括提供无探针卡接口的探针卡分析仪，将具有探针的探针卡可移除地耦合到探针卡分析仪的支撑板，将探针卡分析仪的传感器头与探头对准 卡，并用传感器头测量探头的一个部件。
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公开(公告)号：US09684052B2
公开(公告)日：2017-06-20
申请号：US14298539
申请日：2014-06-06
Applicant: Rudolph Technologies, Inc.
Inventor： Greg Olmstead
CPC classification number: G01R35/00 , G01R31/2891
Abstract: A method of assessing functionality of a probe card includes providing a probe card analyzer without a probe card interface, removably coupling a probe card having probes to a support plate of the probe card analyzer, aligning a sensor head of the probe card analyzer with the probe card, and measuring a component of the probes with the sensor head.
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公开(公告)号：US20140253166A1
公开(公告)日：2014-09-11
申请号：US14282565
申请日：2014-05-20
Applicant: RUDOLPH TECHNOLOGIES, INC.
Inventor： Gary Mark Gunderson , Greg Olmstead
IPC: G01R1/04
CPC classification number: G01R1/04 , G01R31/2891
Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
Abstract translation: 通过本机构检查半导体或类似基板可以最大限度地减少检查板和探针卡中的偏转。 一种检查装置，包括壳体，壳体内的肘节组件，附接在肘节组件内的物镜组件，其包括联接在物镜焦点内的物镜，其中物镜焦点可沿光学轴线偏转;以及凸轮组件，包括旋转 凸轮和窗户托架，其中所述窗口托架可随着所述旋转凸轮的旋转沿着所述光学轴线移动，其中所述凸轮组件联接到所述肘节组件，所述物镜和所述窗口沿着所述光学轴线对准。
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公开(公告)号：US20170276758A1
公开(公告)日：2017-09-28
申请号：US15622246
申请日：2017-06-14
Applicant: Rudolph Technologies, Inc.
Inventor： Greg Olmstead
CPC classification number: G01R35/00 , G01R31/2891
Abstract: A method of assessing functionality of a probe card includes providing a probe card analyzer without a probe card interface, removably coupling a probe card having probes to a support plate of the probe card analyzer, aligning a sensor head of the probe card analyzer with the probe card, and measuring a component of the probes with the sensor head.
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公开(公告)号：US09535089B2
公开(公告)日：2017-01-03
申请号：US14282565
申请日：2014-05-20
Applicant: RUDOLPH TECHNOLOGIES, INC.
Inventor： Gary Mark Gunderson , Greg Olmstead
CPC classification number: G01R1/04 , G01R31/2891
Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
Abstract translation: 通过本机构检查半导体或类似基板可以最大限度地减少检查板和探针卡中的偏转。 一种检查装置，包括壳体，壳体内的肘节组件，附接在肘节组件内的物镜组件，其包括联接在物镜焦点内的物镜，其中物镜焦点可沿光学轴线偏转;以及凸轮组件，包括旋转 凸轮和窗户托架，其中所述窗口托架可随着所述旋转凸轮的旋转沿着所述光学轴线移动，其中所述凸轮组件联接到所述肘节组件，所述物镜和所述窗口沿着所述光学轴线对准。
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