公开(公告)号：US09442377B1

公开(公告)日：2016-09-13

申请号：US14739402

申请日：2015-06-15

Applicant: Rohm and Haas Electronic Materials LLC

Inventor： Owendi Ongayi ,  Charlotte Cutler ,  Mingqi Li ,  Shintaro Yamada ,  James Cameron

IPC: G03F7/075 ,  G03F7/11 ,  G03F7/40 ,  G03F7/09 ,  C08G77/28 ,  C08G77/14 ,  G03F7/20 ,  C09D183/08 ,  C09D183/06 ,  C08G77/18

CPC classification number: G03F7/091 ,  C08G77/14 ,  C08G77/18 ,  C08G77/26 ,  C08G77/28 ,  C08G77/80 ,  C09D183/06 ,  C09D183/08 ,  G03F7/0752 ,  G03F7/168 ,  G03F7/20 ,  G03F7/32

Abstract: Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.

Abstract translation: 提供包含一种或多种不含Q-单体和氢硅烷作为聚合单元的含硅聚合物的可湿剥离的抗反射组合物。 这些组合物可用于制造各种电子装置。

公开(公告)号：US20170009006A1

公开(公告)日：2017-01-12

申请号：US15056352

申请日：2016-02-29

Applicant: Rohm and Haas Electronic Materials LLC

Inventor： Ping Ding ,  Peng-Wei Chuang ,  Christopher Gilmore ,  Cecilia W. Kiarie ,  Young-Seok Kim ,  Jieqian Zhang ,  Aaron A. Rachford ,  Shintaro Yamada ,  James Cameron

IPC: C08G61/10 ,  C08J5/18 ,  H01B3/30 ,  C09D165/00

Abstract: Polyarylene oligomers formed from an aromatic dialkyne monomer having a solubility enhancing moiety show improved solubility in certain organic solvents and are useful in forming dielectric material layers in electronics applications.

Abstract translation: 由具有溶解度增强部分的芳族二双炔单体形成的聚亚芳基低聚物在某些有机溶剂中显示出改善的溶解性，并且可用于在电子应用中形成介电材料层。

公开(公告)号：US20160363861A1

公开(公告)日：2016-12-15

申请号：US15234124

申请日：2016-08-11

Applicant: Rohm and Haas Electronic Materials LLC

Inventor： Owendi Ongayi ,  Charlotte Cutler ,  Mingqi Li ,  Shintaro Yamada ,  James Cameron

IPC: G03F7/09 ,  C08G77/26 ,  C08G77/18 ,  G03F7/32 ,  C09D183/06 ,  G03F7/16 ,  G03F7/20 ,  C08G77/28 ,  C09D183/08

CPC classification number: G03F7/091 ,  C08G77/14 ,  C08G77/18 ,  C08G77/26 ,  C08G77/28 ,  C08G77/80 ,  C09D183/06 ,  C09D183/08 ,  G03F7/0752 ,  G03F7/168 ,  G03F7/20 ,  G03F7/32

Abstract: Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.

Abstract translation: 提供包含一种或多种不含Q-单体和氢硅烷作为聚合单元的含硅聚合物的可湿剥离的抗反射组合物。 这些组合物可用于制造各种电子装置。

公开(公告)号：US10031420B2

公开(公告)日：2018-07-24

申请号：US15234124

申请日：2016-08-11

Applicant: Rohm and Haas Electronic Materials LLC

Inventor： Owendi Ongayi ,  Charlotte Cutler ,  Mingqi Li ,  Shintaro Yamada ,  James Cameron

IPC: G03F7/075 ,  G03F7/11 ,  G03F7/40 ,  G03F7/09 ,  C08G77/28 ,  C08G77/14 ,  G03F7/20 ,  C09D183/08 ,  C09D183/06 ,  C08G77/18 ,  C08G77/00 ,  C08G77/26 ,  G03F7/16 ,  G03F7/32

Abstract: Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.