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    PRESSURE SENSORS AND METHODS OF MAKING PRESSURE SENSORS
    3.
    发明申请
    PRESSURE SENSORS AND METHODS OF MAKING PRESSURE SENSORS 审中-公开

    公开(公告)号：US20200064216A1

    公开(公告)日：2020-02-27

    申请号：US16109425

    申请日：2018-08-22

    Applicant: Rosemount Aerospace Inc.

    Inventor： Christopher Sanden ,  James Joseph Mctighe ,  Cuong Tho Huynh

    IPC: G01L13/02 ,  G01L19/00 ,  G01L19/06

    Abstract: A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.

    Compact or miniature high temperature differential pressure sensor capsule
    4.
    发明授权
    Compact or miniature high temperature differential pressure sensor capsule 有权

    公开(公告)号：US10126193B2

    公开(公告)日：2018-11-13

    申请号：US15000676

    申请日：2016-01-19

    Applicant: Rosemount Aerospace Inc.

    Inventor： Christopher Sanden ,  Odd Harald Steen Eriksen

    IPC: G01L13/06 ,  G01L13/02 ,  G01L19/00 ,  G01L19/04

    Abstract: A differential pressure sensor includes a body having a first end, a second end, and a wall. The first end and second end include isolator diaphragms connected to external first and second process fluid inlets. A MEMS pressure sensor including a pressure sensing diaphragm inside the cylinder has first and second sides coupled to the first and second isolator diaphragms by first and second fill fluid volumes. Sensor elements on the diaphragm are configured to provide, via associated sensor circuitry, an indication of deflection due to pressure differences between the first and second fill volumes. Electrical and fill fluid connections to the differential pressure sensor are made through radial connections in the wall of the body.

    COMPACT OR MINIATURE HIGH TEMPERATURE DIFFERENTIAL PRESSURE SENSOR CAPSULE
    6.
    发明申请
    COMPACT OR MINIATURE HIGH TEMPERATURE DIFFERENTIAL PRESSURE SENSOR CAPSULE 审中-公开

    公开(公告)号：US20170205303A1

    公开(公告)日：2017-07-20

    申请号：US15000676

    申请日：2016-01-19

    Applicant: Rosemount Aerospace Inc.

    Inventor： Christopher Sanden ,  Odd Harald Steen Eriksen

    IPC: G01L13/06

    CPC classification number: G01L13/06 ,  G01L13/026 ,  G01L19/0046 ,  G01L19/0084 ,  G01L19/04

    Abstract: A differential pressure sensor includes a body having a first end, a second end, and a wall. The first end and second end include isolator diaphragms connected to external first and second process fluid inlets. A MEMS pressure sensor including a pressure sensing diaphragm inside the cylinder has first and second sides coupled to the first and second isolator diaphragms by first and second fill fluid volumes. Sensor elements on the diaphragm are configured to provide, via associated sensor circuitry, an indication of deflection due to pressure differences between the first and second fill volumes. Electrical and fill fluid connections to the differential pressure sensor are made through radial connections in the wall of the body.

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