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公开(公告)号:US11749541B2
公开(公告)日:2023-09-05
申请号:US17602279
申请日:2020-04-07
Applicant: SHINKAWA LTD.
Inventor: Shigeyuki Sekiguchi , Yuji Eguchi , Kohei Seyama
IPC: H01L21/67 , H05K13/04 , H01L23/00 , H01L21/683
CPC classification number: H01L21/67144 , H01L21/67132 , H01L24/75 , H05K13/0419 , H01L21/6838 , H01L2224/7565 , H05K13/0409
Abstract: This bonding apparatus is provided with: a tape feeder module which takes out an electronic component from a carrier tape and transfers the electronic component thus taken out; a die supply module which has a die pick-up mechanism for picking up a semiconductor die from a semiconductor wafer bonded to a dicing sheet by pushing up the semiconductor die and which transfers the semiconductor die thus picked up; and a bonding module which arranges, on a circuit substrate, the semiconductor die supplied by the die supply module and/or the electronic component supplied by the tape feeder module.
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公开(公告)号:US12145218B2
公开(公告)日:2024-11-19
申请号:US17913162
申请日:2021-07-20
Applicant: SHINKAWA LTD.
Inventor: Shigeyuki Sekiguchi
Abstract: A flux transfer apparatus (100) includes: a stage (12), having a concave part (13) at a central part; a flux pot (20), having, disposed on a bottom plate (25), a through hole (27) supplying flux (50) to a concave part (13), and reciprocally moving on a surface (14, 15) of the stage (12) to supply the flux (50) to the concave part (13); a detector (30), detecting a remaining amount of the flux (50) stored in the flux pot (20). The detector is disposed on a lower side of the stage (12) or a lateral side of the flux pot (20).
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