公开(公告)号：US09406970B2

公开(公告)日：2016-08-02

申请号：US13957518

申请日：2013-08-02

Applicant: STMicroelectronics (Tours) SAS

Inventor： Dominique Genard

IPC: H01M10/04 ,  H01M10/0525 ,  H01M10/0585 ,  H01M4/04

CPC classification number: H01M10/0436 ,  H01M4/0423 ,  H01M10/0525 ,  H01M10/0585 ,  Y02E60/122 ,  Y02P70/54

Abstract: A method for manufacturing a lithium-ion type battery including the steps of forming in a substrate a recess having lateral walls having a re-entrant profile; depositing, by successive non-conformal physical vapor depositions, a stack of the different layers forming a lithium-ion battery, this stack having a thickness smaller than the depth of the recess; depositing on the structure a filling layer filling the space remaining in the recess; and planarizing the structure to expose the upper surface of the stack.

Abstract translation: 一种锂离子型电池的制造方法，其特征在于，在基板上形成具有侧壁的具有凹入轮廓的凹部的工序; 通过连续的非保形物理气相沉积沉积形成锂离子电池的不同层的堆叠，该堆叠的厚度小于凹部的深度; 在所述结构上沉积填充剩余在所述凹部中的空间的填充层; 并平坦化结构以暴露堆叠的上表面。

公开(公告)号：US20140038028A1

公开(公告)日：2014-02-06

申请号：US13957518

申请日：2013-08-02

Applicant: STMicroelectronics (Tours) SAS

Inventor： Dominique Genard

IPC: H01M10/04

CPC classification number: H01M10/0436 ,  H01M4/0423 ,  H01M10/0525 ,  H01M10/0585 ,  Y02E60/122 ,  Y02P70/54

Abstract: A method for manufacturing a lithium-ion type battery including the steps of forming in a substrate a recess having lateral walls having a re-entrant profile; depositing, by successive non-conformal physical vapor depositions, a stack of the different layers forming a lithium-ion battery, this stack having a thickness smaller than the depth of the recess; depositing on the structure a filling layer filling the space remaining in the recess; and planarizing the structure to expose the upper surface of the stack.

Abstract translation: 一种锂离子型电池的制造方法，其特征在于，在基板上形成具有侧壁的具有凹凸轮廓的凹部的工序; 通过连续的非保形物理气相沉积沉积形成锂离子电池的不同层的堆叠，该堆叠的厚度小于凹部的深度; 在所述结构上沉积填充剩余在所述凹部中的空间的填充层; 并平坦化结构以暴露堆叠的上表面。