Abstract:
A pushable frame includes a plurality of wheels to allow maneuvering due to a rolling motion of one or more wheels. A power generator is operatively connected to the wheels such that kinetic motion of the wheels caused by the frame being pushed or pulled by the user is converted into electric energy. A speed regulator is operatively connected with the plurality of wheels and the power generator such that a rolling speed of one or more wheels is controlled based on a rolling condition of the one or more wheels.
Abstract:
There is provided a method of manufacturing a photomask for forming a semiconductor pattern. The method may include forming a plurality of dies including a main pattern, and forming a pseudo pattern to an area adjacent to the main pattern between the plurality of dies. A multi developing process of sequentially and repeatedly supplying a developer on the mask, supplying DI water on the mask, and drying the mask may be performed in manufacturing the mask.
Abstract:
There is provided a method of manufacturing a photomask for forming a semiconductor pattern. The method may include forming a plurality of dies including a main pattern, and forming a pseudo pattern to an area adjacent to the main pattern between the plurality of dies. A multi developing process of sequentially and repeatedly supplying a developer on the mask, supplying DI water on the mask, and drying the mask may be performed in manufacturing the mask.