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    Method and system of performing three-dimensional imaging using an electron microscope
    3.
    发明授权
    Method and system of performing three-dimensional imaging using an electron microscope 有权
    使用电子显微镜进行三维成像的方法和系统

    公开(公告)号：US08642959B2

    公开(公告)日：2014-02-04

    申请号：US11926791

    申请日：2007-10-29

    Applicant: Shixin Wang

    Inventor： Shixin Wang

    IPC: G01N23/00

    CPC classification number: H01J37/14 ,  H01J29/64 ,  H01J37/09 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1534

    Abstract: A method and electron microscope system of performing three-dimensional imaging using an electron microscope. At least some of the illustrative embodiments are methods comprising generating an electron beam, and creating a hollow-cone electron beam (by passing the electron beam through an annular aperture), focusing the hollow-cone electron beam to form a probe, scanning a specimen using the probe; and performing three-dimensional imaging based on the scanning.

    Abstract translation: 使用电子显微镜进行三维成像的方法和电子显微镜系统。 至少一些说明性实施例是包括产生电子束并产生中空锥形电子束（通过使电子束通过环形孔）的方法，聚焦中空锥形电子束以形成探针，扫描样品 使用探针; 并基于扫描进行三维成像。

    Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
    4.
    发明授权
    Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same 失效
    具有延伸尖端的提升探针，制造和使用方法以及使用其的分析仪器

    公开(公告)号：US07009188B2

    公开(公告)日：2006-03-07

    申请号：US10838878

    申请日：2004-05-04

    Applicant: Shixin Wang

    Inventor： Shixin Wang

    IPC: G21K5/10 ,  G01N35/10 ,  H01J37/08 ,  H01J37/20

    CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J2237/31745

    Abstract: Extension tips for lift-out probes used in conjunction with focused ion beam (FIB) systems and analytical instruments employing such probes are disclosed. Methods of forming the extension tips from a variety of materials such as a silicon wafer, preformed whiskers of conductive material, and metal lines or contacts removed from integrated circuits are also disclosed. Methods of using a variety of extension tips pre-placed within the FIB system to enable reconditioning worn or damaged lift-out probes are also disclosed.

    Abstract translation: 公开了与聚焦离子束（FIB）系统结合使用的提升探针的延伸尖端和采用这种探针的分析仪器。 还公开了从各种材料形成延伸尖端的方法，例如硅晶片，预先形成的导电材料的晶须，以及从集成电路移除的金属线或触点。 还公开了使用预置在FIB系统内的各种延伸尖端以实现修复磨损或损坏的提升探针的方法。

    Method and System of Performing Three-Dimensional Imaging Using An Electron Microscope
    5.
    发明申请
    Method and System of Performing Three-Dimensional Imaging Using An Electron Microscope 有权
    使用电子显微镜进行三维成像的方法和系统

    公开(公告)号：US20090108200A1

    公开(公告)日：2009-04-30

    申请号：US11926791

    申请日：2007-10-29

    Applicant: Shixin Wang

    Inventor： Shixin Wang

    IPC: H01J37/28 ,  H01J3/22

    CPC classification number: H01J37/14 ,  H01J29/64 ,  H01J37/09 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1534

    Abstract: A method and electron microscope system of performing three-dimensional imaging using an electron microscope. At least some of the illustrative embodiments are methods comprising generating an electron beam, and creating a hollow-cone electron beam (by passing the electron beam through an annular aperture), focusing the hollow-cone electron beam to form a probe, scanning a specimen using the probe; and performing three-dimensional imaging based on the scanning.

    Abstract translation: 使用电子显微镜进行三维成像的方法和电子显微镜系统。 至少一些说明性实施例是包括产生电子束并产生中空锥形电子束（通过使电子束通过环形孔）的方法，聚焦中空锥形电子束以形成探针，扫描样品 使用探针; 并基于扫描进行三维成像。

    LIFT-OUT PROBE HAVING AN EXTENSION TIP, METHODS OF MAKING AND USING, AND ANALYTICAL INSTRUMENTS EMPLOYING SAME
    6.
    发明申请
    LIFT-OUT PROBE HAVING AN EXTENSION TIP, METHODS OF MAKING AND USING, AND ANALYTICAL INSTRUMENTS EMPLOYING SAME 失效
    具有延伸尖端的伸出探头，制造和使用方法以及使用其的分析仪器

    公开(公告)号：US20050247886A1

    公开(公告)日：2005-11-10

    申请号：US10838878

    申请日：2004-05-04

    Applicant: Shixin Wang

    Inventor： Shixin Wang

    IPC: G01N1/28 ,  G01N1/32 ,  H01J37/20 ,  H01J37/305

    CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J2237/31745

    Abstract: Extension tips for lift-out probes used in conjunction with focused ion beam (FIB) systems and analytical instruments employing such probes are disclosed. Methods of forming the extension tips from a variety of materials such as a silicon wafer, preformed whiskers of conductive material, and metal lines or contacts removed from integrated circuits are also disclosed. Methods of using a variety of extension tips pre-placed within the FIB system to enable reconditioning worn or damaged lift-out probes are also disclosed.

    Abstract translation: 公开了与聚焦离子束（FIB）系统结合使用的提升探针的延伸尖端和采用这种探针的分析仪器。 还公开了从各种材料形成延伸尖端的方法，例如硅晶片，预先形成的导电材料的晶须，以及从集成电路移除的金属线或触点。 还公开了使用预置在FIB系统内的各种延伸尖端以实现修复磨损或损坏的提升探针的方法。

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