公开(公告)号：US08760234B2

公开(公告)日：2014-06-24

申请号：US13550950

申请日：2012-07-17

Applicant: Shogo Inaba

Inventor： Shogo Inaba

IPC: H03B5/30

CPC classification number: H03H9/2457 ,  B81B3/007 ,  B81B2201/014 ,  H03H3/0072 ,  H03H2009/02283 ,  H03H2009/02456 ,  H03H2009/02511

Abstract: A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion.

Abstract translation: MEMS振动器包括：基板; 设置在所述基板上方的第一电极; 以及第二电极，其设置在所述第二电极的至少一部分具有在所述第一电极和所述第二电极之间的空间的状态下，并且具有能够在所述基板的厚度方向上以静电力振动的光束部分， 支撑部分，其支撑梁部分的一个边缘并且设置在基板上方，其中支撑所述一个边缘的支撑部分的支撑侧面具有从基板的厚度方向在平面图中弯曲的弯曲部分，并且所述一个边缘 由包括弯曲部的支撑侧面支撑。

公开(公告)号：US08410561B2

公开(公告)日：2013-04-02

申请号：US12975065

申请日：2010-12-21

Applicant: Akira Sato ,  Toru Watanabe ,  Shogo Inaba ,  Takeshi Mori

Inventor： Akira Sato ,  Toru Watanabe ,  Shogo Inaba ,  Takeshi Mori

IPC: H01L31/00

CPC classification number: B81C1/00246 ,  B81B2207/015 ,  B81B2207/07 ,  B81C2203/0136 ,  B81C2203/0714 ,  B81C2203/0735 ,  H01L21/7682 ,  H01L24/05 ,  H01L2924/14 ,  H01L2924/00

Abstract: An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.

Abstract translation: 公开了一种电子设备，包括基板，构成在基板上形成的功能元件的功能结构，以及形成其中设置有功能结构的空腔部分的盖结构。 在电子设备中，盖结构包括层间绝缘膜和布线层的叠层结构，层叠结构以包围空腔部分的方式形成在基板上，盖结构具有上侧盖部分 从上方覆盖空腔部分，上侧盖部分形成有设置在功能结构上方的布线层的一部分。

公开(公告)号：US08198957B2

公开(公告)日：2012-06-12

申请号：US13270868

申请日：2011-10-11

Applicant: Shogo Inaba ,  Akira Sato

Inventor： Shogo Inaba ,  Akira Sato

IPC: H03H9/00 ,  H03H3/007

CPC classification number: H03H9/2457 ,  H03H3/0072 ,  H03H9/02433 ,  H03H2009/02511

Abstract: A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.

Abstract translation: 一种微电子机械系统谐振器，包括：基板; 形成在基板上的固定电极; 以及可动电极，其布置成面对固定电极并且通过作用在固定电极和可动电极之间的间隙的静电吸引力或静电排斥力驱动。 面对固定电极的可动电极的支撑梁的内表面具有倾斜表面。

公开(公告)号：US08018302B2

公开(公告)日：2011-09-13

申请号：US12534468

申请日：2009-08-03

Applicant: Shogo Inaba ,  Akira Sato

Inventor： Shogo Inaba ,  Akira Sato

IPC: H03H9/00 ,  H03H3/007

CPC classification number: H03H9/2457 ,  H03H3/0072 ,  H03H9/02433 ,  H03H2009/02511

Abstract: A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.

公开(公告)号：US20080093685A1

公开(公告)日：2008-04-24

申请号：US11876107

申请日：2007-10-22

Applicant: Toru Watanabe ,  Akira Sato ,  Shogo Inaba ,  Takeshi Mori

Inventor： Toru Watanabe ,  Akira Sato ,  Shogo Inaba ,  Takeshi Mori

IPC: H01L29/84

CPC classification number: B81B3/0086 ,  B81B2201/0271

Abstract: A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

Abstract translation: 微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。 井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。

公开(公告)号：US08063721B2

公开(公告)日：2011-11-22

申请号：US12639102

申请日：2009-12-16

Applicant: Shogo Inaba ,  Akira Sato

Inventor： Shogo Inaba ,  Akira Sato

IPC: H03H9/00 ,  H03H3/007

CPC classification number: H03H9/2457 ,  H03H3/0072 ,  H03H9/02433 ,  H03H2009/02511

Abstract: A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.

Abstract translation: 一种微电子机械系统谐振器，包括：基板; 形成在基板上的固定电极; 以及可动电极，其布置成面对固定电极并且通过作用在固定电极和可动电极之间的间隙的静电吸引力或静电排斥力驱动。 面对固定电极的可动电极的支撑梁的内表面具有倾斜表面。

公开(公告)号：US08026120B2

公开(公告)日：2011-09-27

申请号：US12684248

申请日：2010-01-08

Applicant: Ryuji Kihara ,  Shogo Inaba

Inventor： Ryuji Kihara ,  Shogo Inaba

IPC: H01L21/00

CPC classification number: H03H3/0077 ,  H03H9/2457 ,  H03H2009/02496 ,  H03H2009/02511

Abstract: A method of manufacturing an MEMS device includes: forming a covering structure having an MEMS structure and a hollow portion, which is located on a periphery of the MEMS structure and is opened to an outside, on a substrate; and performing surface etching for the MEMS structure in a gas phase by supplying an etching gas to the periphery of the MEMS structure from the outside.

Abstract translation: 一种制造MEMS器件的方法包括：在基板上形成具有MEMS结构的覆盖结构和位于MEMS结构的外围并向外部敞开的中空部分; 并且通过从外部向MEMS结构的外围提供蚀刻气体，在气相中对MEMS结构进行表面蚀刻。

公开(公告)号：US07884431B2

公开(公告)日：2011-02-08

申请号：US12710773

申请日：2010-02-23

Applicant: Toru Watanabe ,  Akira Sato ,  Shogo Inaba ,  Takeshi Mori

Inventor： Toru Watanabe ,  Akira Sato ,  Shogo Inaba ,  Takeshi Mori

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: B81B3/0086 ,  B81B2201/0271

Abstract: A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

Abstract translation: 微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。 井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。

公开(公告)号：US07880245B2

公开(公告)日：2011-02-01

申请号：US12707943

申请日：2010-02-18

Applicant: Akira Sato ,  Toru Watanabe ,  Shogo Inaba ,  Takeshi Mori

Inventor： Akira Sato ,  Toru Watanabe ,  Shogo Inaba ,  Takeshi Mori

IPC: H01L31/00

CPC classification number: B81C1/00246 ,  B81B2207/015 ,  B81B2207/07 ,  B81C2203/0136 ,  B81C2203/0714 ,  B81C2203/0735 ,  H01L21/7682 ,  H01L24/05 ,  H01L2924/14 ,  H01L2924/00

Abstract: An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.

Abstract translation: 公开了一种电子设备，包括基板，构成在基板上形成的功能元件的功能结构，以及形成其中设置有功能结构的空腔部分的盖结构。 在电子设备中，盖结构包括层间绝缘膜和布线层的叠层结构，层叠结构以包围空腔部分的方式形成在基板上，并且盖结构具有上侧盖部分 从上方覆盖空腔部分，上侧盖部分形成有设置在功能结构上方的布线层的一部分。

公开(公告)号：US07838952B2

公开(公告)日：2010-11-23

申请号：US11872351

申请日：2007-10-15

Applicant: Shogo Inaba ,  Akira Sato ,  Toru Watanabe ,  Takeshi Mori

Inventor： Shogo Inaba ,  Akira Sato ,  Toru Watanabe ,  Takeshi Mori

IPC: H01L49/00

CPC classification number: B81B3/0086

Abstract: A micro electro mechanical system (MEMS) device includes: a fixed electrode made of silicon and provided above a semiconductor substrate; a movable electrode made of silicon and arranged in a mechanically movable manner by having a gap from the semiconductor substrate; and a wiring layered part that is provided around the movable electrode, covers a portion of the fixed electrode and includes wiring. One of the fixed electrode and the movable electrode is implanted with an impurity ion and at least a part of the portion of the fixed electrode covered by the wiring layered part is silicidized.

Abstract translation: 微电子机械系统（MEMS）装置包括：由硅制成并设置在半导体衬底之上的固定电极; 由硅制成的可移动电极，通过与半导体衬底有间隙以机械可移动的方式布置; 以及设置在可动电极周围的布线层叠部，覆盖固定电极的一部分并且包括布线。 固定电极和可动电极之一注入杂质离子，被布线层叠部覆盖的固定电极的部分的至少一部分被硅化。