DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE

    公开(公告)号:US20250122072A1

    公开(公告)日:2025-04-17

    申请号:US18913431

    申请日:2024-10-11

    Abstract: An acoustic sensor device includes a substrate and a first transducer supported by the substrate, the first transducer configured to generate a first output signal when exposed to a sound wave. The acoustic sensor device also include a second transducer supported by the substrate, the second transducer configured to generate a second output signal when exposed to a sound wave. The first transducer and the second transducer are configured such that the first output signal generated by the first transducer and the second output signal generated by the second transducer are opposite in polarity.

    MEMS TRANSDUCER
    3.
    发明申请

    公开(公告)号:US20220396470A1

    公开(公告)日:2022-12-15

    申请号:US17840131

    申请日:2022-06-14

    Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

    MEMS transducer
    4.
    发明授权

    公开(公告)号:US12297096B2

    公开(公告)日:2025-05-13

    申请号:US18200885

    申请日:2023-05-23

    Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

    MULTI-DIRECTIONAL ACOUSTIC SENSOR DEVICES

    公开(公告)号:US20250033953A1

    公开(公告)日:2025-01-30

    申请号:US18786239

    申请日:2024-07-26

    Abstract: An acoustic sensor device comprises a package, a substrate disposed in the package or forming a part of the package, and a plurality of microelectromechanical system (MEMS) transducers supported by the substrate and packaged in the package. The plurality of sound ports configured to couple the plurality of MEMS transducers to an ambient environment of the acoustic sensor device. The plurality of sound ports are arranged in the package such that respective MEMS transducers, among the plurality of MEMS transducers, exhibit different directional pick-up patterns with respect to sound waves traveling in the ambient environment of the acoustic sensor device.

    MEMS MICROPHONE WITH MULTIPLE SOUND PORTS
    7.
    发明公开

    公开(公告)号:US20230254635A1

    公开(公告)日:2023-08-10

    申请号:US18106294

    申请日:2023-02-06

    Abstract: An acoustic sensor device comprises a package and a substrate disposed in the package. The acoustic sensor device also comprises a microelectromechanical system (MEMS) transducer formed in the substrate, the MEMS transducer i) comprising a cantilever structure and ii) having a first acoustic impedance and at least two sound ports positioned on the package on opposing sides of the MEMS transducer. The at least two sound ports coupling the MEMS transducer to an ambient environment via respective acoustic channels formed in the package, wherein the at least two sound ports are positioned on the package in a manner that ensures that the respective acoustic channels have a combined second acoustic impendence that is less the first acoustic impedance of the MEMS transducer.

    Multiple layer electrode transducers

    公开(公告)号:US12139394B2

    公开(公告)日:2024-11-12

    申请号:US17237814

    申请日:2021-04-22

    Abstract: An electrostatic transducer includes a substrate oriented in a plane, a fixed electrode supported by the substrate, and a moveable electrode supported by the substrate, spaced from the fixed electrode in a first direction parallel to the plane, and configured for movement in a second direction transverse to the plane, such that an extent to which the fixed and moveable electrodes overlap changes during the movement. The fixed and moveable electrodes comprise one or more of a plurality of conductive layers, the plurality of conductive layers including at least three layers. The fixed electrode includes a stacked arrangement of two or more spaced apart conductive layers of the plurality of conductive layers.

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