公开(公告)号：US20170089813A1

公开(公告)日：2017-03-30

申请号：US15379049

申请日：2016-12-14

Applicant: TECHINSIGHTS INC.

Inventor： Robert K. Foster ,  Christopher Pawlowicz ,  Jason Abt ,  Ian Jones ,  Heinz Josef Nentwich

IPC: G01N1/32 ,  H01J37/32 ,  H01L23/00

Abstract: There is provided a method, system and computer program product to delayer a layer of a sample, the layer comprising one or more materials, in an ion beam mill by adjusting one or more operating parameters of the ion beam mill and selectively removing each of the one or more materials at their respective predetermined rates. There is also provided a method and system for obtaining rate of removal of a material from a sample in an ion beam mill.

公开(公告)号：US10689763B2

公开(公告)日：2020-06-23

申请号：US15379049

申请日：2016-12-14

Applicant: TECHINSIGHTS INC.

Inventor： Robert K. Foster ,  Christopher Pawlowicz ,  Jason Abt ,  Ian Jones ,  Heinz Josef Nentwich

IPC: C23F4/00 ,  G01N1/32 ,  H01L23/00 ,  H01J37/32 ,  H01L21/263 ,  H01L21/66

Abstract: There is provided a method, system and computer program product to delayer a layer of a sample, the layer comprising one or more materials, in an ion beam mill by adjusting one or more operating parameters of the ion beam mill and selectively removing each of the one or more materials at their respective predetermined rates. There is also provided a method and system for obtaining rate of removal of a material from a sample in an ion beam mill.

公开(公告)号：US20170096741A1

公开(公告)日：2017-04-06

申请号：US15378551

申请日：2016-12-14

Applicant: TECHINSIGHTS INC.

Inventor： Robert K. Foster ,  Christopher Pawlowicz ,  Jason Abt ,  Ian Jones ,  Heinz Josef Nentwich

IPC: C23F4/00 ,  H01J37/32 ,  G01N1/32 ,  H01L21/263 ,  H01L21/66

Abstract: There is provided a method, system and computer program product to delayer a layer of a sample, the layer comprising one or more materials, in an ion beam mill by adjusting one or more operating parameters of the ion beam mill and selectively removing each of the one or more materials at their respective predetermined rates. There is also provided a method and system for obtaining rate of removal of a material from a sample in an ion beam mill.

公开(公告)号：US11214874B2

公开(公告)日：2022-01-04

申请号：US16906436

申请日：2020-06-19

Applicant: TECHINSIGHTS INC.

Inventor： Robert K. Foster ,  Christopher Pawlowicz ,  Jason Abt ,  Ian Jones ,  Heinz Josef Nentwich

IPC: G01N1/32 ,  C23F4/00 ,  H01L23/00 ,  H01J37/32 ,  H01L21/263 ,  H01L21/66

Abstract: There is provided a method, system and computer program product to delayer a layer of a sample, the layer comprising one or more materials, in an ion beam mill by adjusting one or more operating parameters of the ion beam mill and selectively removing each of the one or more materials at their respective predetermined rates. There is also provided a method and system for obtaining rate of removal of a material from a sample in an ion beam mill.

公开(公告)号：US12176177B2

公开(公告)日：2024-12-24

申请号：US17805663

申请日：2022-06-06

Applicant: TECHINSIGHTS INC.

Inventor： Christopher Pawlowicz ,  Alexander Sorkin ,  Trevor Jason French ,  Ian Jones ,  Paul Gagnon

IPC: H01J37/08 ,  H01J37/32

Abstract: Described are various embodiments of an ion beam chamber fluid delivery system and method for delivering a fluid onto a substrate in an ion beam system during operation. In one embodiment, the system comprises: a chamber comprising an ion beam gun oriented so as to cause ions to impinge the substrate, said chamber having a fluid delivery conduit therein for delivering the fluid into the chamber; a transferable substrate stage for holding the substrate, the transferable stage further configured to move between an operating position and a payload position during non-operation, said payload position for receiving and removing said substrate; and a fluid delivery nozzle being in a fixed location relative to the transferable stage, at least during operation, with an outlet position that is configured to deliver a fluid to a predetermined location on said transferable stage.

公开(公告)号：US20200318242A1

公开(公告)日：2020-10-08

申请号：US16906436

申请日：2020-06-19

Applicant: TECHINSIGHTS INC.

Inventor： Robert K. Foster ,  Christopher Pawlowicz ,  Jason Abt ,  Ian Jones ,  Heinz Josef Nentwich

IPC: C23F4/00 ,  G01N1/32 ,  H01L23/00 ,  H01J37/32 ,  H01L21/263 ,  H01L21/66

Abstract: There is provided a method, system and computer program product to delayer a layer of a sample, the layer comprising one or more materials, in an ion beam mill by adjusting one or more operating parameters of the ion beam mill and selectively removing each of the one or more materials at their respective predetermined rates. There is also provided a method and system for obtaining rate of removal of a material from a sample in an ion beam mill.

公开(公告)号：US10550480B2

公开(公告)日：2020-02-04

申请号：US15378551

申请日：2016-12-14

Applicant: TECHINSIGHTS INC.

Inventor： Robert K. Foster ,  Christopher Pawlowicz ,  Jason Abt ,  Ian Jones ,  Heinz Josef Nentwich

IPC: C23F4/00 ,  G01N1/32 ,  H01L23/00 ,  H01J37/32 ,  H01L21/263 ,  H01L21/66

Abstract: There is provided a method, system and computer program product to delayer a layer of a sample, the layer comprising one or more materials, in an ion beam mill by adjusting one or more operating parameters of the ion beam mill and selectively removing each of the one or more materials at their respective predetermined rates. There is also provided a method and system for obtaining rate of removal of a material from a sample in an ion beam mill.