公开(公告)号：US10883924B2

公开(公告)日：2021-01-05

申请号：US14847624

申请日：2015-09-08

Applicant: THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK

Inventor： Sam O' Mullane ,  Alain C. Diebold ,  Brennan Peterson ,  Nicholas Keller

IPC: G01N21/21 ,  G01B11/02 ,  G01N21/95 ,  G01N21/956

Abstract: There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating.