公开(公告)号：US09689912B2

公开(公告)日：2017-06-27

申请号：US13708019

申请日：2012-12-07

Applicant: TSMC Solar Ltd.

Inventor： Ming-Tien Tsai ,  Tzu-Huan Cheng

IPC: G01R27/08 ,  G01R31/26 ,  H02S50/10 ,  H02S50/00

CPC classification number: G01R31/2642 ,  H02S50/00 ,  H02S50/10

Abstract: A method and apparatus for measuring thickness of a film in a solar cell provides for directing light emitted at multiple emission wavelengths, to a surface of the solar cell. Each emission results in the generation of a responsive photo current. The photo currents are read by a current meter having one contact coupled to a surface of the solar cell and another contact coupled to another surface. The currents associated with each of the different light emissions are identified and the thickness of a film in the solar cell is calculated based on the two currents or associated quantum efficiencies, and associated absorption coefficients. In one embodiment, the film thickness is the thickness of a CdS or other buffer film in a thin film solar cell.

公开(公告)号：US09130113B2

公开(公告)日：2015-09-08

申请号：US13714823

申请日：2012-12-14

Applicant: TSMC Solar Ltd.

Inventor： Yung-Sheng Chiu ,  Chun-Heng Chen ,  Tzu-Huan Cheng ,  Chien-Yao Huang

IPC: H01L21/44 ,  H01L31/18

CPC classification number: H01L31/1884 ,  Y02E10/50

Abstract: A method and system provide for depositing a TCO, transparent conductive oxide, film in one chamber of a manufacturing tool then irradiating the TCO film with light energy in another chamber of the same tool. The TCO film is used in a solar cell and formed on a solar cell substrate in some embodiments. The method includes irradiating the TCO film for a time and energy to reduce resistance of the TCO film without reducing transmittance. One or multiple light sources are used in the light irradiation chamber. Light in the infrared range, visible light range and ultraviolet light range are used either individually or in combination.

Abstract translation: 一种方法和系统提供了在制造工具的一个室中沉积TCO，透明导电氧化物膜，然后在同一工具的另一个室中用光能照射TCO膜。 在一些实施例中，TCO膜用于太阳能电池并形成在太阳能电池基板上。 该方法包括对TCO膜照射一段时间和能量以降低TCO膜的电阻而不降低透射率。 在光照射室中使用一个或多个光源。 单独或组合使用红外范围，可见光范围和紫外线光范围内的光。

公开(公告)号：US09947807B2

公开(公告)日：2018-04-17

申请号：US14173841

申请日：2014-02-06

Applicant: TSMC Solar Ltd.

Inventor： Tzu-Huan Cheng

IPC: H04B5/00 ,  H01L31/02 ,  H02J50/10 ,  H02J50/12 ,  H02J7/02 ,  H02J7/35

CPC classification number: H01L31/02021 ,  H02J7/025 ,  H02J7/35 ,  H02J50/10 ,  H02J50/12 ,  H04B5/0081 ,  Y02E10/50

Abstract: A solar module includes a solar panel and a wireless power transmission module coupled to the solar panel for transmitting power generated by the solar panel wirelessly.

公开(公告)号：US09583655B2

公开(公告)日：2017-02-28

申请号：US14048086

申请日：2013-10-08

Applicant: TSMC Solar Ltd.

Inventor： Tzu-Huan Cheng

IPC: H01L31/0256 ,  H01L31/18 ,  H01L31/032 ,  H01L31/0749

CPC classification number: H01L31/0322 ,  H01L31/0323 ,  H01L31/0749 ,  H01L31/1864 ,  Y02E10/541 ,  Y02P70/521

Abstract: A method of fabricating a photovoltaic device includes forming an absorber layer comprising an absorber material above a substrate, forming a buffer layer over the absorber layer, forming a front transparent layer over the buffer layer, and exposing the photovoltaic device to heat or radiation at a temperature from about 80° C. to about 500° C. for a period of time, subsequent to the step of forming a buffer layer over the absorber layer.

Abstract translation: 制造光伏器件的方法包括在衬底上形成包括吸收体材料的吸收层，在吸收层上方形成缓冲层，在缓冲层上形成前透明层，并将光电器件曝光于 温度在约80℃至约500℃的温度下进行一段时间，之后在吸收层上方形成缓冲层。

公开(公告)号：US09368659B2

公开(公告)日：2016-06-14

申请号：US14061803

申请日：2013-10-24

Applicant: TSMC Solar Ltd.

Inventor： Tzu-Huan Cheng ,  Chia-Hung Tsai

IPC: H01L21/00 ,  H01L31/032 ,  H01L31/0216 ,  H01L31/0224 ,  H01L31/0749 ,  H01L31/18

CPC classification number: H01L31/022441 ,  H01L31/02167 ,  H01L31/022425 ,  H01L31/0322 ,  H01L31/0392 ,  H01L31/0749 ,  H01L31/1864 ,  H01L31/1868 ,  Y02E10/541 ,  Y02P70/521

Abstract: A method includes depositing spacers at a plurality of locations directly on a back contact layer over a solar cell substrate. An absorber layer is formed over the back contact layer and the spacers. The absorber layer is partially in contact with the spacers and partially in direct contact with the back contact layer. The solar cell substrate is heated to form voids between the absorber layer and the back contact layer at the locations of the spacers.

Abstract translation: 一种方法包括在多个位置上直接在太阳能电池基板上的背接触层上沉积间隔物。 在后接触层和间隔物之上形成吸收层。 吸收层部分地与间隔物接触并且部分地与背接触层直接接触。 加热太阳能电池基板以在间隔物的位置处在吸收层和背接触层之间形成空隙。

公开(公告)号：US09103659B1

公开(公告)日：2015-08-11

申请号：US14191475

申请日：2014-02-27

Applicant: TSMC Solar Ltd.

Inventor： Tzu-Huan Cheng

IPC: G01B11/06 ,  G01N21/33 ,  G01N21/35 ,  G01B11/02

CPC classification number: G01R31/2601 ,  G01B11/02 ,  G01B11/0625 ,  G01R31/2648 ,  G01R31/2656 ,  H01L22/14

Abstract: Provided is a method for identifying material junctions and doping characteristics in semiconductor and other materials by illuminating the material and measuring voltage. A correlation between penetration depth of light and wavelength of light is established for a material. Photons are applied to materials such as semiconductor materials to induce charge. The photons are applied by exposing the material to light having a range of wavelengths. The induced charge results in a measurable voltage. The voltage is measured and the voltage measurements used to determine a junction depth and charge concentration of a material using the correlation between penetration depth of light and wavelength of light.

Abstract translation: 提供了一种通过照射材料并测量电压来识别半导体和其他材料中的材料结和掺杂特性的方法。 确定材料的穿透深度和光的波长之间的相关性。 光子被应用于诸如半导体材料的材料以诱导电荷。 通过将材料暴露于具有一定波长范围的光来施加光子。 感应电荷导致可测量的电压。 使用光的穿透深度和光的波长之间的相关性来测量电压并且使用电压测量来确定材料的结深度和电荷浓度。