公开(公告)号：US12261086B2

公开(公告)日：2025-03-25

申请号：US17586699

申请日：2022-01-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Hsu ,  Ssu-I Fu ,  Yu-Hsiang Lin ,  Chien-Ting Lin ,  Chun-Ya Chiu ,  Chia-Jung Hsu ,  Chin-Hung Chen

IPC: H01L21/8234 ,  H01L23/60 ,  H01L27/088

Abstract: A method for fabricating a semiconductor device includes first providing a substrate having a high-voltage (HV) region, a medium-voltage (MV) region, and a low-voltage (LV) region, forming a HV device on the HV region, and forming a LV device on the LV region. Preferably, the HV device includes a first base on the substrate, a first gate dielectric layer on the first base, and a first gate electrode on the first gate dielectric layer. The LV device includes a fin-shaped structure on the substrate, and a second gate electrode on the fin-shaped structure, in which a top surface of the first gate dielectric layer is even with a top surface of the fin-shaped structure.

公开(公告)号：US20240371855A1

公开(公告)日：2024-11-07

申请号：US18772301

申请日：2024-07-15

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Hsu ,  Ssu-I Fu ,  Yu-Hsiang Lin ,  Chien-Ting Lin ,  Chia-Jung Hsu ,  Chun-Ya Chiu ,  Chin-Hung Chen

IPC: H01L27/02 ,  H01L29/06 ,  H01L29/417 ,  H01L29/66 ,  H01L29/78

Abstract: A semiconductor device includes a substrate having a high-voltage (HV) region, a medium-voltage (MV) region, and a low-voltage (LV) region, a HV device on the HV region, and a LV device on the LV region. Preferably, the HV device includes a first base on the substrate, a first gate dielectric layer on the first base, and a first gate electrode on the first gate dielectric layer. The LV device includes a fin-shaped structure on the substrate and a second gate electrode on the fin-shaped structure, in which a top surface of the first gate dielectric layer is lower than a top surface of the fin-shaped structure.

公开(公告)号：US12094783B2

公开(公告)日：2024-09-17

申请号：US18209490

申请日：2023-06-14

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Hsu ,  Ssu-I Fu ,  Chun-Ya Chiu ,  Chi-Ting Wu ,  Chin-Hung Chen ,  Yu-Hsiang Lin

IPC: H01L29/06 ,  H01L21/8234 ,  H01L27/088

CPC classification number: H01L21/823481 ,  H01L21/823431 ,  H01L27/0886 ,  H01L29/0649

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a fin-shaped structure thereon; forming a single diffusion break (SDB) structure in the substrate to divide the fin-shaped structure into a first portion and a second portion; forming a first gate structure on the SDB structure; forming an interlayer dielectric (ILD) layer around the first gate structure; transforming the first gate structure into a first metal gate; removing the first metal gate to form a first recess; and forming a dielectric layer in the first recess.

公开(公告)号：US20230268424A1

公开(公告)日：2023-08-24

申请号：US17706574

申请日：2022-03-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chia-Jung Hsu ,  Ssu-I Fu ,  Chih-Kai Hsu ,  Chun-Ya Chiu ,  Chin-Hung Chen ,  Yu-Hsiang Lin ,  Chien-Ting Lin

IPC: H01L29/66 ,  H01L29/78 ,  H01L29/06 ,  H01L21/8234 ,  H01L21/762

CPC classification number: H01L29/66795 ,  H01L29/7851 ,  H01L29/0649 ,  H01L21/823431 ,  H01L21/762

Abstract: A method for fabricating a semiconductor device includes the steps of providing a substrate having a high-voltage (HV) region and a low-voltage (LV) region, forming first fin-shaped structures on the HV region, and then performing an oxidation process to form a gate oxide layer on and directly connecting the first fin-shaped structures. Preferably, a bottom surface of the gate oxide layer includes first bumps on the first fin-shaped structures while a top surface of the gate oxide layer includes second bumps.

公开(公告)号：US11682728B2

公开(公告)日：2023-06-20

申请号：US17073038

申请日：2020-10-16

Applicant: United Microelectronics Corp. ,  Chun-Ya Chiu ,  Chih-Kai Hsu ,  Chin-Hung Chen ,  Chia-Jung Hsu ,  Ssu-I Fu ,  Yu-Hsiang Lin

Inventor： Chun-Ya Chiu ,  Chih-Kai Hsu ,  Chin-Hung Chen ,  Chia-Jung Hsu ,  Ssu-I Fu ,  Yu-Hsiang Lin

IPC: H01L29/78 ,  H01L29/08 ,  H01L29/165 ,  H01L29/267 ,  H01L29/66 ,  H01L21/02

CPC classification number: H01L29/7848 ,  H01L21/02521 ,  H01L21/02532 ,  H01L29/0847 ,  H01L29/165 ,  H01L29/267 ,  H01L29/66636

Abstract: The disclosure discloses a structure of high-voltage (HV) transistor which includes a substrate. An epitaxial doped structure with a first conductive type is formed in the substrate, wherein a top portion of the epitaxial doped structure includes a top undoped epitaxial layer. A gate structure is disposed on the substrate and at least overlapping with the top undoped epitaxial layer. A source/drain (S/D) region with a second conductive type is formed in the epitaxial doped structure at a side of the gate structure. The first conductive type is different from the second conductive type.

公开(公告)号：US20220093741A1

公开(公告)日：2022-03-24

申请号：US17511579

申请日：2021-10-27

Applicant: United Microelectronics Corp.

Inventor： Chia-Jung Hsu ,  Chin-Hung Chen ,  Chun-Ya Chiu ,  Chih-Kai Hsu ,  Ssu-I Fu ,  Tsai-Yu Wen ,  Shi You Liu ,  Yu-Hsiang Lin

IPC: H01L29/10 ,  H01L21/265 ,  H01L29/06 ,  H01L29/167

Abstract: A structure of semiconductor device is provided, including a substrate. First and second trench isolations are disposed in the substrate. A height of a portion of the substrate is between a top and a bottom of the first and second trench isolations. A gate insulation layer is disposed on the portion of the substrate between the first and second trench isolations. A first germanium (Ge) doped layer region is disposed in the portion of the substrate just under the gate insulation layer. A second Ge doped layer region is in the portion of the substrate, overlapping with the first Ge doped layer region to form a Ge gradient from high to low along a depth direction under the gate insulation layer. A fluorine (F) doped layer region is in the portion of the substrate, lower than and overlapping with the first germanium doped layer region.

公开(公告)号：US11152515B2

公开(公告)日：2021-10-19

申请号：US16572556

申请日：2019-09-16

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chin-Hung Chen ,  Ssu-I Fu ,  Chih-Kai Hsu ,  Chun-Ya Chiu ,  Chia-Jung Hsu ,  Yu-Hsiang Lin

IPC: H01L29/786 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L21/306 ,  H01L21/02

Abstract: A manufacturing method of a semiconductor device includes the following steps. An opening is formed penetrating a dielectric layer on a semiconductor substrate. A stacked structure is formed on the dielectric layer. The stacked structure includes a first semiconductor layer partly formed in the opening and partly formed on the dielectric layer, a sacrificial layer formed on the first semiconductor layer, and a second semiconductor layer formed on the sacrificial layer. A patterning process is performed for forming a fin-shaped structure including the first semiconductor layer, the sacrificial layer, and the second semiconductor layer. An etching process is performed to remove the sacrificial layer in the fin-shaped structure. The first semiconductor layer in the fin-shaped structure is etched to become a first semiconductor wire by the etching process. The second semiconductor layer in the fin-shaped structure is etched to become a second semiconductor wire by the etching process.

公开(公告)号：US20210296182A1

公开(公告)日：2021-09-23

申请号：US17338666

申请日：2021-06-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Hsu ,  Ssu-I Fu ,  Chun-Ya Chiu ,  Chi-Ting Wu ,  Chin-Hung Chen ,  Yu-Hsiang Lin

IPC: H01L21/8234 ,  H01L29/06 ,  H01L27/088

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a fin-shaped structure thereon; forming a single diffusion break (SDB) structure in the substrate to divide the fin-shaped structure into a first portion and a second portion; forming a first gate structure on the SDB structure; forming an interlayer dielectric (ILD) layer around the first gate structure; transforming the first gate structure into a first metal gate; removing the first metal gate to form a first recess; and forming a dielectric layer in the first recess.

公开(公告)号：US10854502B2

公开(公告)日：2020-12-01

申请号：US16733214

申请日：2020-01-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Hsu ,  Ssu-I Fu ,  Chun-Ya Chiu ,  Chi-Ting Wu ,  Chin-Hung Chen ,  Yu-Hsiang Lin

IPC: H01L21/762 ,  H01L21/8234 ,  H01L29/78 ,  H01L29/66

Abstract: A semiconductor device includes a gate structure on a fin-shaped structure, a single diffusion break (SDB) structure adjacent to the gate structure, a shallow trench isolation (STI) around the fin-shaped structure, and an isolation structure on the STI. Preferably, a top surface of the SDB structure is even with a top surface of the isolation structure, and the SDB structure includes a bottom portion in the fin-shaped structure and a top portion on the bottom portion.

公开(公告)号：US20250113589A1

公开(公告)日：2025-04-03

申请号：US18979508

申请日：2024-12-12

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Hsu ,  Ssu-I Fu ,  Chun-Ya Chiu ,  Chi-Ting Wu ,  Chin-Hung Chen ,  Yu-Hsiang Lin

IPC: H01L21/8234 ,  H01L27/088 ,  H01L29/06

Abstract: A semiconductor device includes a single diffusion break (SDB) structure dividing a fin-shaped structure into a first portion and a second portion, an isolation structure on the SDB structure, a first spacer adjacent to the isolation structure, a metal gate adjacent to the isolation structure, a shallow trench isolation (STI around the fin-shaped structure, and a second isolation structure on the STI. Preferably, a top surface of the first spacer is lower than a top surface of the isolation structure and a bottom surface of the first spacer is lower than a bottom surface of the metal gate.