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公开(公告)号:US12204249B1
公开(公告)日:2025-01-21
申请号:US17853630
申请日:2022-06-29
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Alexander Neumann , Vineeth Sasidharan
Abstract: A system for oblique incidence nanopatterning a sample using a grating beam-splitter is disclosed. The system also includes a grating beam-splitter on a tip-tilt adjustable mount. The system also includes a photoresist coated sample mounted on a tip-tilt-z adjustable mount. The system also includes an alignment system to allow adjustment of the tip-tilt adjustable mounts so that a surface of the grating beam-splitter and a surface of the photoresist coated sample are substantially parallel. The system also includes a laser operating at a wavelength suitable for exposure of the photoresist. The system also includes an optical system to deliver a laser beam at oblique incidence to the grating beam-splitter to expose the photoresist coated sample. The system also includes means to control an exposure dose of the laser beam. A system using two grating beam-splitters to provide increased alignment tolerance is also disclosed.
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公开(公告)号:US12092959B1
公开(公告)日:2024-09-17
申请号:US17592659
申请日:2022-02-04
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Alexander Neumann , Vineeth Sasidharan
CPC classification number: G03F7/70408 , G02B27/1086 , G02B27/144 , G03F7/7055
Abstract: According to examples of the present disclosure, a method for large-area, full-wafer nanopatterning is disclosed. The method includes providing a laser light source; providing beam conditioning and translation optics to expand the beam to illuminate a full wafer area; providing a grating beam-splitter; providing recombination optics to direct at least two beams from the grating beam splitter to a full wafer photoresist-coated target; and exposing the full wafer photoresist-coated target.
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公开(公告)号:US11480463B2
公开(公告)日:2022-10-25
申请号:US17238444
申请日:2021-04-23
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Alexander Neumann , Payman Zarkesh-Ha
IPC: G01J1/06 , G01J3/02 , G01J3/18 , G01J1/44 , G01J3/28 , G02B6/122 , G02B6/124 , H01L27/144 , H01L31/02 , H01L31/0216 , H01L31/0232 , H01L31/103 , G02B6/12
Abstract: An occupancy sensor covering a wide field in an integrated chip is disclosed. The occupancy sensor includes an array of grating coupled waveguide sensors wherein continuous wave (cw) signals monitor an ambient light field for dynamic changes on times scales of seconds, and high frequency signals map in three-dimensions of the space using time-of-flight (TOF) measurements, pixel level electronics that perform signal processing; array level electronics that perform additional signal processing; and communications and site level electronics that interface with actuators to respond to occupancy sensing.
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公开(公告)号:US12203921B2
公开(公告)日:2025-01-21
申请号:US18528948
申请日:2023-12-05
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Jeremy Scott Edwards , Alexander Neumann , Yuliya Kuznetsova , Edgar A. Mendoza
IPC: G01N33/487 , B01L3/00 , C12Q1/6869 , C23C16/34 , C23C16/455 , C23C16/50 , G01N21/65
Abstract: Methods and apparatus for long read, label-free, optical nanopore long chain molecule sequencing. In general, the present disclosure describes a novel sequencing technology based on the integration of nanochannels to deliver single long-chain molecules with widely spaced (>wavelength), ˜1-nm aperture “tortuous” nanopores that slow translocation sufficiently to provide massively parallel, single base resolution using optical techniques. A novel, directed self-assembly nanofabrication scheme using simple colloidal nanoparticles is used to form the nanopore arrays atop nanochannels that unfold the long chain molecules. At the surface of the nanoparticle array, strongly localized electromagnetic fields in engineered plasmonic/polaritonic structures allow for single base resolution using optical techniques.
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公开(公告)号:US11474094B2
公开(公告)日:2022-10-18
申请号:US16215139
申请日:2018-12-10
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Jeremy Scott Edwards , Alexander Neumann , Yuliya Kuznetsova , Edgar A. Mendoza
IPC: G01N33/487 , C12Q1/6869 , G01N21/65 , B01L3/00 , C23C16/34 , C23C16/455 , C23C16/50
Abstract: Methods and apparatus for long read, label-free, optical nanopore long chain molecule sequencing. In general, the present disclosure describes a novel sequencing technology based on the integration of nanochannels to deliver single long-chain molecules with widely spaced (>wavelength), ˜1-nm aperture “tortuous” nanopores that slow translocation sufficiently to provide massively parallel, single base resolution using optical techniques. A novel, directed self-assembly nanofabrication scheme using simple colloidal nanoparticles is used to form the nanopore arrays atop nanochannels that unfold the long chain molecules. At the surface of the nanoparticle array, strongly localized electromagnetic fields in engineered plasmonic/polaritonic structures allow for single base resolution using optical techniques.
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公开(公告)号:US11326946B2
公开(公告)日:2022-05-10
申请号:US16605529
申请日:2018-05-22
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Payman Zarkesh-Ha , Alexander Neumann
Abstract: Provided is a spectral sensor array, including: a planar waveguide on a substrate; a chirped input coupling grating, wherein the chirped input coupling grating comprises a transverse chirp to provide a spectrally selective coupling of incident light into the planar waveguide; an output coupling grating; and an array of photodetectors arranged to receive the light coupled out of the waveguide.
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公开(公告)号:US10976299B1
公开(公告)日:2021-04-13
申请号:US15944226
申请日:2018-04-03
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Yuliya Kuznetsova , Alexander Neumann
IPC: B01D69/04 , B81C1/00 , G01N33/487 , G03F7/20 , C12Q1/6869 , G01N27/447
Abstract: In accordance with the disclosure, a method of forming a nanochannel is provided. The method includes depositing a photosensitive film stack over a substrate; forming a pattern on the film stack using interferometric lithography; depositing a plurality of silica nanoparticles to form a structure over the pattern; removing the pattern while retaining the structure formed by the plurality of silica nanoparticles, wherein the structure comprises one or more enclosed nanochannels, wherein each of the one or more nanochannels comprise one or more sidewalls and a roof; and partially sealing the roof of one or more nanochannels, wherein the roof comprises no more than one unsealed nanochannel per squared micron.
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公开(公告)号:US10989590B2
公开(公告)日:2021-04-27
申请号:US16542505
申请日:2019-08-16
Applicant: UNM RAINFOREST INNOVATIONS
Inventor: Steven R. J. Brueck , Alexander Neumann , Payman Zarkesh-Ha
IPC: G01J1/06 , G01J3/18 , G01J3/02 , G01J1/44 , G01J3/28 , G02B6/122 , G02B6/124 , H01L27/144 , H01L31/02 , H01L31/0216 , H01L31/0232 , H01L31/103 , G02B6/12
Abstract: A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.
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