公开(公告)号：US12078830B2

公开(公告)日：2024-09-03

申请号：US17457123

申请日：2021-12-01

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Jinhui Yang ,  Marius Grigonis ,  Karen Denise Hendrix ,  Andy Shkabko

IPC: G02B5/28 ,  G02B1/10

CPC classification number: G02B5/286 ,  G02B1/10

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.

公开(公告)号：US11867935B2

公开(公告)日：2024-01-09

申请号：US17449149

申请日：2021-09-28

Applicant: VIAVI Solutions Inc.

Inventor： Jinhui Yang ,  Marius Grigonis ,  Georg J. Ockenfuss ,  Karen Denise Hendrix

IPC: G02B5/28 ,  B32B7/023 ,  B32B7/02 ,  B32B17/10 ,  C23C14/00 ,  C23C14/06 ,  C23C14/34 ,  C23C14/35 ,  G02B5/20

CPC classification number: G02B5/285 ,  B32B7/02 ,  B32B7/023 ,  B32B17/10229 ,  C23C14/0036 ,  C23C14/0617 ,  C23C14/3464 ,  C23C14/35 ,  G02B5/207 ,  Y10T428/24942 ,  Y10T428/266

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers, wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.