公开(公告)号：US10923324B2

公开(公告)日：2021-02-16

申请号：US16254177

申请日：2019-01-22

Applicant: Verity Instruments, Inc.

Inventor： Mark A. Meloni

IPC: H01J37/32 ,  H05H1/46 ,  H05H1/00 ,  H01L21/3065

Abstract: The disclosure provides a plasma source and an excitation system for excitation of a plasma, and an optical monitoring system. In one embodiment the plasma source includes: (1) a coaxial resonant cavity body having an inner length, and including a first end, a second end, an inner electrode and an outer electrode, (2) a radio frequency signal interface electrically coupled to the inner and outer electrodes at a fixed position along the inner length and configured to provide a radio frequency signal to the coaxial resonant cavity body, (3) a window positioned at the first end of the coaxial resonant cavity body, and (4) a mounting flange positioned proximate the window at the first end of the coaxial resonant cavity body and defining a plasma cavity, wherein the window forms one side of the plasma cavity and isolates the coaxial resonant cavity body from plasma in the plasma cavity.

公开(公告)号：US20200264044A1

公开(公告)日：2020-08-20

申请号：US16788024

申请日：2020-02-11

Applicant: Verity Instruments, Inc.

Inventor： Mark A. Meloni ,  John D. Corless

IPC: G01J3/02 ,  H01L21/66

Abstract: An optical system having an OAP mirror collimator is disclosed with a housing, an OAP mirror located within the housing and has an optical axis, a fold plane and a focal point. A fiber optical cable is coupled to the housing and has first and second optical fibers, each having an exit end that form a common end face of the fiber optic cable, wherein the fiber optical cable is rotationally and translationally aligned to the OAP mirror such that the common face is perpendicular to and centered upon the optical axis of the OAP mirror and positioned a fixed distance from the focal point, and wherein the optical axes of the first and second optical fibers are jointly angularly aligned to the fold plane, and the optical axes of the first and second optical fibers deviate from being parallel to the optical axis by no more than 0.15 degrees.

公开(公告)号：US10679832B2

公开(公告)日：2020-06-09

申请号：US16022389

申请日：2018-06-28

Applicant: Verity Instruments, Inc.

Inventor： Mark A. Meloni

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/3065 ,  H01L21/66

Abstract: The disclosure provides a plasma source, an excitation system for excitation of a plasma, and a method of operating an excitation measurement system. In one embodiment, the plasma source includes: (1) a coaxial radio frequency (RF) resonator including a first end, a second end, an inner electrode and an outer electrode, (2) a radio frequency interface electrically coupled to the inner and outer electrode and configured to provide an RF signal to the coaxial RF resonator, (3) a flange positioned at the first end of the resonator and defining a plasma cavity, and (4) a window positioned between the first end of the resonator and the flange, and forming one side of the plasma cavity, whereby the coaxial RF resonator is isolated from the plasma.

公开(公告)号：US10794763B2

公开(公告)日：2020-10-06

申请号：US16788024

申请日：2020-02-11

Applicant: Verity Instruments, Inc.

Inventor： Mark A. Meloni ,  John D. Corless

IPC: G01J3/00 ,  G01J3/02 ,  H01L21/66

Abstract: An optical system having an OAP mirror collimator is disclosed with a housing, an OAP mirror located within the housing and has an optical axis, a fold plane and a focal point. A fiber optical cable is coupled to the housing and has first and second optical fibers, each having an exit end that form a common end face of the fiber optic cable, wherein the fiber optical cable is rotationally and translationally aligned to the OAP mirror such that the common face is perpendicular to and centered upon the optical axis of the OAP mirror and positioned a fixed distance from the focal point, and wherein the optical axes of the first and second optical fibers are jointly angularly aligned to the fold plane, and the optical axes of the first and second optical fibers deviate from being parallel to the optical axis by no more than 0.15 degrees.

公开(公告)号：US20190157045A1

公开(公告)日：2019-05-23

申请号：US16254177

申请日：2019-01-22

Applicant: Verity Instruments, Inc.

Inventor： Mark A. Meloni

IPC: H01J37/32 ,  H05H1/46

Abstract: The disclosure provides a plasma source and an excitation system for excitation of a plasma, and an optical monitoring system. In one embodiment the plasma source includes: (1) a coaxial resonant cavity body having an inner length, and including a first end, a second end, an inner electrode and an outer electrode, (2) a radio frequency signal interface electrically coupled to the inner and outer electrodes at a fixed position along the inner length and configured to provide a radio frequency signal to the coaxial resonant cavity body, (3) a window positioned at the first end of the coaxial resonant cavity body, and (4) a mounting flange positioned proximate the window at the first end of the coaxial resonant cavity body and defining a plasma cavity, wherein the window forms one side of the plasma cavity and isolates the coaxial resonant cavity body from plasma in the plasma cavity.

公开(公告)号：US20190013187A1

公开(公告)日：2019-01-10

申请号：US16022389

申请日：2018-06-28

Applicant: Verity Instruments, Inc.

Inventor： Mark A. Meloni

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/3065 ,  H01L21/66

Abstract: The disclosure provides a plasma source, an excitation system for excitation of a plasma, and a method of operating an excitation measurement system. In one embodiment, the plasma source includes: (1) a coaxial radio frequency (RF) resonator including a first end, a second end, an inner electrode and an outer electrode, (2) a radio frequency interface electrically coupled to the inner and outer electrode and configured to provide an RF signal to the coaxial RF resonator, (3) a flange positioned at the first end of the resonator and defining a plasma cavity, and (4) a window positioned between the first end of the resonator and the flange, and forming one side of the plasma cavity, whereby the coaxial RF resonator is isolated from the plasma.