公开(公告)号：US11892572B1

公开(公告)日：2024-02-06

申请号：US17138079

申请日：2020-12-30

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Schleuning ,  Ralph Shepard

IPC: G02B26/08 ,  G01S7/497

CPC classification number: G01S7/497 ,  G02B26/0833

Abstract: The present disclosure relates to multi-channel optical transmitter modules, lidar systems, and methods that involve micromirror devices. An example optical transmitter module includes at least one light-emitter device and a plurality of micromirror devices optically-coupled to the at least one light-emitter device. The at least one light-emitter device is configured to emit respective light beams toward an environment via the micromirror devices. The micromirror devices are configured to deflect the light beams. The optical transmitter module also includes a controller having at least one processor and a memory. The controller is configured to carry out operations. The operations include receiving information indicative of a retroreflector object in the environment. The operations include, based on the received information, causing at least one micromirror device of the plurality of micromirror devices to deflect at least one light beam so that the at least one light beam does not interact with the retroreflector object.

公开(公告)号：US20230333319A1

公开(公告)日：2023-10-19

申请号：US18337119

申请日：2023-06-19

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison ,  Pierre-Yves Droz ,  Yeh-Jiun Tung

IPC: G02B6/125 ,  G02B6/122 ,  G01S7/481 ,  G02B6/42 ,  G01S17/10 ,  G01S17/42

CPC classification number: G02B6/125 ,  G02B6/1228 ,  G01S7/4815 ,  G02B6/4202 ,  G01S17/10 ,  G01S17/42 ,  G01S7/4812

Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.

公开(公告)号：US20230055675A1

公开(公告)日：2023-02-23

申请号：US18046403

申请日：2022-10-13

Applicant: Waymo LLC

Inventor： Hongqin Shi ,  Yeh-Jiun Tung ,  James Dunphy ,  Cesar Gensoli

IPC: G03F7/20

Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.

公开(公告)号：US20230003852A1

公开(公告)日：2023-01-05

申请号：US17363658

申请日：2021-06-30

Applicant: Waymo LLC

Inventor： James Dunphy ,  Caner Onal ,  David Schleuning

IPC: G01S7/497 ,  G01S7/48 ,  G01S17/931

Abstract: The present disclosure relates to light detection and ranging (lidar) systems, lidar-equipped vehicles, and associated methods. An example method includes causing a firing circuit to trigger emission of an initial group of detection pulses from at least one light-emitter device of a lidar system in accordance with an initial set of one or more light-emission parameters. The method also includes causing the firing circuit to trigger emission of one or more test pulses and receiving, from at least one detector, information indicative of one or more return test pulses. The method yet further includes determining, based on the received information, a presence of a retroreflector based on an intensity of the return test pulse. The method additionally includes determining a subsequent set of light-emission parameters and causing the firing circuit to trigger emission of a subsequent group of detection pulses in accordance with the subsequent set of light-emission parameters.

公开(公告)号：US11500295B2

公开(公告)日：2022-11-15

申请号：US17166743

申请日：2021-02-03

Applicant: Waymo LLC

Inventor： Hongqin Shi ,  Yeh-Jiun Tung ,  James Dunphy ,  Cesar Gensoli

IPC: G03F7/20

Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.

公开(公告)号：US20220299705A1

公开(公告)日：2022-09-22

申请号：US17835464

申请日：2022-06-08

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison ,  Pierre-Yves Droz ,  Yeh-Jiun Tung

IPC: G02B6/125 ,  G01S7/481 ,  G02B6/42 ,  G02B6/122

Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.

公开(公告)号：US11385406B2

公开(公告)日：2022-07-12

申请号：US16667833

申请日：2019-10-29

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison ,  Pierre-Yves Droz ,  Yeh-Jiun Tung

IPC: G02B6/125 ,  G01S7/481 ,  G02B6/122 ,  G02B6/42 ,  G01S17/10

Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.

公开(公告)号：US20220082660A1

公开(公告)日：2022-03-17

申请号：US17121918

申请日：2020-12-15

Applicant: Waymo LLC

Inventor： Pierre-Yves Droz ,  Ralph H. Shepard ,  Augusto Tazzoli ,  David Hutchison ,  David Schleuning ,  Nathaniel Golshan ,  Nathaniel Quillin ,  Andrew Abo ,  Caner Onal ,  Michael Tom ,  Robert Lockwood ,  Kelvin Kwong ,  Daiwei Li ,  Drew Ulrich ,  Simon Ellgas ,  Chandra Kakani ,  Erin Eppard ,  Samuel Lenius ,  Justin Andrade ,  James Dunphy

IPC: G01S7/484 ,  G01S7/481 ,  G01F23/00 ,  G01S17/931 ,  G01S17/89

Abstract: Example embodiments relate to light detection and ranging (lidar) devices having a light-guide manifold. An example lidar device includes a transmit subsystem. The transmit subsystem includes a light emitter. The transmit subsystem also includes a light-guide manifold optically coupled to the light emitter. Further, the transmit subsystem includes a telecentric lens assembly optically coupled to the light-guide manifold. The lidar device also includes a receive subsystem. The receive subsystem includes the telecentric lens assembly. The receive subsystem also includes an aperture plate having an aperture defined therein. The aperture plate is positioned at a focal plane of the telecentric lens assembly. Further, the receive subsystem includes a silicon photomultiplier (SiPM) positioned to receive light traveling through the aperture.

公开(公告)号：US20210397094A1

公开(公告)日：2021-12-23

申请号：US17464185

申请日：2021-09-01

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison

IPC: G03F7/20 ,  G03F7/00 ,  G03F7/26

Abstract: Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example system may include an optical component configured to direct light from a light source to illuminate a photoresist material at a desired angle and to expose at least a portion of an angled structure in the photoresist material, where the photoresist material overlays at least a portion of a top surface of a substrate. The optical component includes a container containing an light-coupling material that is selected based in part on the desired angle. The optical component also includes a mirror arranged to reflect at least a portion of the light to illuminate the photoresist material at the desired angle.

公开(公告)号：US11131934B2

公开(公告)日：2021-09-28

申请号：US16666952

申请日：2019-10-29

Applicant: Waymo LLC

Inventor： James Dunphy ,  David Hutchison

IPC: G03B27/72 ,  G03F7/20 ,  G02B6/42

Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.