公开(公告)号：US12078791B2

公开(公告)日：2024-09-03

申请号：US17451498

申请日：2021-10-20

Applicant: Yangtze Memory Technologies Co., Ltd.

Inventor： Jun Liu ,  Yu Li ,  Yi Li ,  Yingfei Wang ,  Shiyan Wu ,  Qiangmin Wei

IPC: G02B21/36 ,  G02B21/16 ,  H01J37/26

CPC classification number: G02B21/367 ,  G02B21/16 ,  H01J37/261 ,  H01J2237/2802

Abstract: Aspects of the disclosure provide a method of tilting characterization. The method includes measuring a first tilting shift of structures based on a first disposition of the structures. The structures are formed in a vertical direction on a horizontal plane of a product. A second tilting shift of the structures is measured based on a second disposition of the structures. The second disposition is a horizontal flip of the first disposition. A corrected tilting shift is determined based on the first tilting shift and the second tilting shift.