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公开(公告)号：US08980013B2
公开(公告)日：2015-03-17
申请号：US13486084
申请日：2012-06-01
Applicant: Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
Inventor： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
CPC classification number: G03F7/168 , B08B3/024 , G03F7/3021 , H01L21/67051
Abstract: A substrate cleaning method that includes: a step in which, while a substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a shortest distance between an edge of a cleaning liquid flow output from the cleaning-liquid nozzle and an edge of a gas flow output from the gas nozzle is set between 9 mm and 15 mm.
Abstract translation: 一种基板清洗方法，其特征在于，包括：在基板保持件持续旋转的同时，将基板上的清洗液的排出位置变更为偏离基板的中心部的偏心位置， 气体从气体喷嘴排出到基板的中心部分，以便在从清洗液喷嘴输出的清洗液流的边缘之间的最短距离的条件下形成清洁液体的干燥区域 并且从气体喷嘴输出的气流的边缘被设定在9mm和15mm之间。
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公开(公告)号：US08956694B2
公开(公告)日：2015-02-17
申请号：US12904458
申请日：2010-10-14
Applicant: Hirofumi Takeguchi , Tomohiro Iseki , Yuichi Yoshida , Kousuke Yoshihara
Inventor： Hirofumi Takeguchi , Tomohiro Iseki , Yuichi Yoshida , Kousuke Yoshihara
CPC classification number: G03F7/3021
Abstract: A pretreatment process, carried out prior to a developing process, spouts pure water, namely, a diffusion-assisting liquid for assisting the spread of a developer over the surface of a wafer, through a cleaning liquid spouting nozzle onto a central part of the wafer to form a puddle of pure water. The developer is spouted onto the central part of the wafer for prewetting while the wafer is rotated at a high rotating speed to spread the developer over the surface of the wafer. The developer dissolves the resist film partly and produces a solution. The rotation of the wafer is reversed, for example, within 7 s in which the solution is being produced to reduce the water-repellency of the wafer by spreading the solution over the entire surface of the wafer. Then, the developer is spouted onto the rotating wafer to spread the developer on the surface of the wafer.
Abstract translation: 在显影过程之前进行的预处理过程，喷出纯水，即用于辅助显影剂在晶片表面上的扩散的扩散辅助液体，通过清洗液喷射喷嘴到达晶片的中心部分 形成一个纯净的水坑。 将显影剂喷射到晶片的中心部分以进行预润湿，同时晶片以高转速旋转以将显影剂铺展在晶片的表面上。 显影剂部分地溶解抗蚀剂膜并产生溶液。 晶片的旋转例如在7秒内相反，其中产生溶液以通过在晶片的整个表面上扩散溶液来降低晶片的拒水性。 然后，将显影剂喷射到旋转的晶片上，以将显影剂铺展在晶片的表面上。
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公开(公告)号：US08947476B2
公开(公告)日：2015-02-03
申请号：US13520243
申请日：2011-01-06
Applicant: Yuichi Yoshida , Kazunari Tomizawa , Tomohiko Mori
Inventor： Yuichi Yoshida , Kazunari Tomizawa , Tomohiko Mori
CPC classification number: G09G3/3648 , G02F2201/52 , G09G3/2074 , G09G5/026 , G09G2300/0452 , G09G2320/0242 , G09G2320/0666 , G09G2340/06
Abstract: A liquid crystal display device includes a liquid crystal display panel and a driving circuit that supplies display signals to a plurality of subpixels of the liquid crystal display panel. The plurality of subpixels are a red subpixel, a green subpixel, a blue subpixel, and a yellow subpixel. When achromatic colors of at least some gray levels among all gray levels are to be displayed by the pixel, display signals which are supplied to a first subpixel group composed of certain two subpixels are display signals of the same grayscale level, whereas display signals which are supplied to a second subpixel group composed of the other two subpixels are display signals of a different grayscale level from the grayscale level of the display signals supplied to the first subpixel group. The first subpixel group includes the yellow subpixel, and the second subpixel group includes the blue subpixel.
Abstract translation: 液晶显示装置包括液晶显示面板和向液晶显示面板的多个子像素提供显示信号的驱动电路。 多个子像素是红色子像素，绿色子像素，蓝色子像素和黄色子像素。 当由像素显示所有灰度级中的至少一些灰度级的无彩色时，提供给由特定两个子像素构成的第一子像素组的显示信号是相同灰度级的显示信号，而显示信号 提供给由其他两个子像素构成的第二子像素组是从提供给第一子像素组的显示信号的灰度级别的不同灰度级的显示信号。 第一子像素组包括黄色子像素，第二子像素组包括蓝色子像素。
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公开(公告)号：US20140253422A1
公开(公告)日：2014-09-11
申请号：US14241766
申请日：2012-08-28
Applicant: Kazunari Tomizawa , Yuichi Yoshida , Tomohiko Mori , Makoto Hasegawa
Inventor： Kazunari Tomizawa , Yuichi Yoshida , Tomohiko Mori , Makoto Hasegawa
IPC: G09G3/36
CPC classification number: G09G3/3607 , G02F1/133514 , G09G2320/0242 , G09G2320/028 , G09G2340/06 , G09G2360/16
Abstract: This liquid crystal display device (100) includes a pixel defined by a plurality of subpixels that includes red, green, blue and yellow subpixels (R, G, B, Ye). As long as the sum of respective luminances of all of the subpixels but the blue subpixel (B) falls within the range of 0% to 50% while the color displayed by the pixel is changing from the color blue in which the blue subpixel (B) is at the highest grayscale level and the other subpixels are at the lowest grayscale level into the color white in which all of those subpixels are at the highest grayscale level substantially without changing its hue, the yellow subpixel (Ye) starts to increase its grayscale level at a different timing, and/or has its grayscale level increased at a different ratio with respect to an increase in the pixel's luminance, from the red and green subpixels (R, G) do.
Abstract translation: 该液晶显示装置（100）包括由包括红色，绿色，蓝色和黄色子像素（R，G，B，Ye）的多个子像素限定的像素。 只要所有子像素而蓝色子像素（B）的各亮度的和落在0％〜50％的范围内，而由像素显示的颜色从蓝色子像素（B ）处于最高灰度级，其他子像素处于最低灰度级，进入白色，其中所有这些子像素基本上处于最高灰度级，而不改变其色调，黄色子像素（Ye）开始增加其灰度 在与红色和绿色子像素（R，G）do相对于像素亮度增加的不同比例增加和/或其灰度等级增加。
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公开(公告)号：US20140118423A1
公开(公告)日：2014-05-01
申请号：US14128643
申请日：2012-06-22
Applicant: Makoto Hasegawa , Kazunari Tomizawa , Tomohiko Mori , Yuichi Yoshida
Inventor： Makoto Hasegawa , Kazunari Tomizawa , Tomohiko Mori , Yuichi Yoshida
IPC: G09G3/20
CPC classification number: G09G3/2074 , G09G3/2003 , G09G3/3607 , G09G2320/0247 , G09G2320/0276 , G09G2320/028 , G09G2360/16
Abstract: Viewing angle characteristics on the entire display surface are improved while suppressing harmful effects such as flicker and banding caused by viewing angle improvement control. A liquid crystal display apparatus (1) includes: a liquid crystal panel (11) which includes a plurality of pixels arranged in a matrix; a drive control unit (24) which performs viewing angle improvement processing by converting a gradation of a video signal input to the pixel; and a processing object determination unit (22) which determines whether or not an image displayed on each of the pixels of the liquid crystal panel (11) is an image having an intermediate color. The drive control unit (24) is configured to perform the viewing angle improvement processing on the pixel determined by the processing object determination unit (22) such that the pixel displays the image having the intermediate color.
Abstract translation: 改善了整个显示面上的视角特性，同时抑制由视角改善控制引起的闪烁和带状等有害影响。 液晶显示装置（1）包括：液晶面板（11），包括以矩阵排列的多个像素; 驱动控制单元（24），其通过转换输入到像素的视频信号的灰度来执行视角改善处理; 以及处理对象确定单元（22），其确定在液晶面板（11）的每个像素上显示的图像是否是具有中间颜色的图像。 驱动控制单元（24）被配置为对由处理对象确定单元（22）确定的像素执行视角改善处理，使得像素显示具有中间颜色的图像。
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Patent Agency Ranking
6.发明授权Method of adjusting fuel distribution, membrane which adjusts fuel distribution, method of producing membrane which adjusts fuel distribution, fuel cell, and method of producing fuel cell 失效调整燃料分配的方法，调整燃料分配的膜，调节燃料分配的膜的制造方法，燃料电池及燃料电池的制造方法公开(公告)号：US08354200B2
公开(公告)日：2013-01-15
申请号：US11859240
申请日：2007-09-21
Applicant: Takahiro Terada , Yasutada Nakagawa , Yuji Sasaki , Yuichi Yoshida
Inventor： Takahiro Terada , Yasutada Nakagawa , Yuji Sasaki , Yuichi Yoshida
CPC classification number: H01M8/04007 , H01M8/0289 , H01M8/04186 , H01M8/1011 , H01M8/1065 , Y02E60/523 , Y02P70/56
Abstract: A method of adjusting a fuel distribution includes: adjusting a distribution of a fuel supply amount to a membrane electrode assembly so that a temperature distribution in the membrane electrode assembly becomes substantially uniform by a membrane provided in a fuel supply side of the membrane electrode assembly of a fuel cell. A membrane adjusts a fuel distribution, which is provided in a fuel supply side of a membrane electrode assembly of a fuel cell. The membrane is provided with openings so that a temperature distribution in the membrane electrode assembly becomes substantially uniform.
Abstract translation: 调节燃料分配的方法包括：调节与膜电极组件的燃料供给量的分布，使得膜电极组件中的温度分布通过设置在膜电极组件的燃料供给侧的膜变得基本均匀 燃料电池 膜调节燃料分布，其设置在燃料电池的膜电极组件的燃料供给侧。 膜具有开口，使得膜电极组件中的温度分布变得基本均匀。
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公开(公告)号：US20120234362A1
公开(公告)日：2012-09-20
申请号：US13486084
申请日：2012-06-01
Applicant: Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
Inventor： Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
CPC classification number: G03F7/168 , B08B3/024 , G03F7/3021 , H01L21/67051
Abstract: A substrate cleaning method that includes: a step in which, while a substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a shortest distance between an edge of a cleaning liquid flow output from the cleaning-liquid nozzle and an edge of a gas flow output from the gas nozzle is set between 9 mm and 15 mm.
Abstract translation: 一种基板清洗方法，其特征在于，包括：在基板保持件持续旋转的同时，将基板上的清洗液的排出位置变更为偏离基板的中心部的偏心位置， 气体从气体喷嘴排出到基板的中心部分，以便在从清洗液喷嘴输出的清洗液流的边缘之间的最短距离的条件下形成清洁液体的干燥区域 并且从气体喷嘴输出的气流的边缘被设定在9mm和15mm之间。
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8.发明授权公开(公告)号：US08262300B2
公开(公告)日：2012-09-11
申请号：US13025300
申请日：2011-02-11
Applicant: Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
Inventor： Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
CPC classification number: G03B27/52 , G03F7/3021 , H01L21/6715 , H01L21/67178 , H01L21/6719 , H01L21/67745 , H01L21/67748 , H01L21/68742 , H01L21/68785
Abstract: A coating and developing apparatus develops a substrate of which surface is coated with resist and exposed to lights. The coating and developing apparatus includes a developing module; a cleaning module; and a transfer mechanism configured to transfer a substrate developed by the developing module to the cleaning module. The developing module includes an airtightly sealed processing vessel configured to form a processing atmosphere; a temperature control plate provided in the processing vessel and mounts thereon the substrate and cools the substrate; and an atmosphere gas supply unit configured to supply an atmosphere gas including mist of a developing solution to a surface of the substrate within the processing vessel. The cleaning module includes a mounting table configured to mount thereon the substrate; and a cleaning solution supply unit configured to supply a cleaning solution to the substrate mounted on the mounting table.
Abstract translation: 涂层和显影设备开发其表面被抗蚀剂涂覆并暴露于光的基底。 涂料和显影装置包括显影模块; 清洁模块; 以及传送机构，其构造成将由显影模块显影的基板传送到清洁模块。 显影模块包括构造成形成处理气氛的气密密封处理容器; 设置在处理容器中并安装在其上的温度控制板并冷却基板; 以及气氛气体供给单元，被构造成将处理容器内的显影液的气雾气体气体供给至基板的表面。 清洁模块包括：安装台，其安装在其上; 以及清洗液供给单元，其构造成将清洗液供给到安装在所述安装台上的基板。
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9.发明授权公开(公告)号：US08102512B2
公开(公告)日：2012-01-24
申请号：US11575392
申请日：2005-09-16
Applicant: Makoto Shibuta , Yuichi Yoshida , Hiroaki Takaiwa
Inventor： Makoto Shibuta , Yuichi Yoshida , Hiroaki Takaiwa
CPC classification number: G03F7/70341 , G03F7/707 , H01L21/6715 , H01L21/6838 , H01L21/68735 , H01L21/6875 , Y10T29/49002
Abstract: To provide a substrate holding apparatus which can prevent a liquid from entering into a rear surface side of a substrate. A substrate holding apparatus (PH) is provided with a base material (PHB), a first holding portion (PH1) formed on the base material (PHB) for holding the substrate (P), and a second holding portion (PH2) formed on the base material (PHB) for holding a plate member (T) by surrounding the circumference of a processing substrate (P) held by the first holding portion (PH1). The second holding portion (PH2) holds the plate member (T) so as to form a second space (32) on the side of the rear surface (Tb) of the plate member (T). On the rear surface (Tb) of the plate member (T), an absorbing member (100) is arranged for absorbing the liquid (LQ) entered from a gap (A) between the substrate (P) held by the first holding portion (PH1) and the plate member (T) held by the second holding portion (PH2).
Abstract translation: 提供一种能够防止液体进入基板的背面侧的基板保持装置。 基板保持装置（PH）设置有基材（PHB），形成在用于保持基板（P）的基材（PHB）上的第一保持部分（PH1），以及形成在第一保持部分 用于通过围绕由第一保持部分（PH1）保持的处理衬底（P）的周围来保持板构件（T）的基底材料（PHB）。 第二保持部（PH2）保持板构件（T），以在板构件（T）的后表面（Tb）侧形成第二空间（32）。 在板状构件（T）的后表面（Tb）上设置吸收构件（100），用于吸收从由第一保持部（T）保持的基板（P）之间的间隙（A）进入的液体（LQ） PH1）和由第二保持部（PH2）保持的板构件（T）。
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公开(公告)号：US20110216109A1
公开(公告)日：2011-09-08
申请号：US13128884
申请日：2009-11-05
Applicant: Shun Ueki , Kozo Nakamura , Tomohiko Mori , Kazunari Tomizawa , Yuichi Yoshida
Inventor： Shun Ueki , Kozo Nakamura , Tomohiko Mori , Kazunari Tomizawa , Yuichi Yoshida
IPC: G09G5/10
CPC classification number: H04N9/64 , G02F1/133514 , G02F2201/52 , G09G3/3607 , G09G5/06 , G09G2300/0452 , G09G2320/0242 , G09G2340/06
Abstract: A multiple primary color display device which suppresses the reduction in the display quality when an input signal corresponding to green in an sRGB color space is input from outside is provided. A display device according to the present invention has a pixel defined by a plurality of sub pixels. The plurality of sub pixels include at least a red sub pixel for displaying red, a green sub pixel for displaying green, a blue sub pixel for displaying blue, and a yellow sub pixel for displaying yellow. When an input signal corresponding to green in the sRGB color space is input from outside, the display device according to the present invention provides display using the yellow sub pixel in addition to the green sub pixel.
Abstract translation: 提供了从外部输入与sRGB颜色空间中的绿色对应的输入信号时抑制显示质量降低的多原色显示装置。 根据本发明的显示装置具有由多个子像素限定的像素。 多个子像素至少包括用于显示红色的红色子像素，用于显示绿色的绿色子像素，用于显示蓝色的蓝色子像素和用于显示黄色的黄色子像素。 当从外部输入对应于sRGB色彩空间中的绿色的输入信号时，根据本发明的显示装置除了绿色子像素之外还提供使用黄色子像素的显示。
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