公开(公告)号：US20250130183A1

公开(公告)日：2025-04-24

申请号：US18491587

申请日：2023-10-20

Applicant: Applied Materials, Inc.

Inventor： Alexander Buhse Brady ,  Tushar Ranjan Swain ,  Vlad Kudriashov ,  Zhenhua Ge

IPC: G01N23/201 ,  G01N23/2055

Abstract: A method includes receiving, by a processing device, a first small angle scattering image of a substrate. The substrate includes a number of structures oriented at a first angle relative to a base of the substrate. The first small angle scattering image of the substrate is collected at a second angle of incidence of radiation relative to the base of the substrate, different than the first angle. The method further includes determining a first-order Fourier term associated with the first small angle scattering image by performing angular Fourier decomposition of the first small angle scattering image. The method further includes determining a value of the first angle based on the first-order Fourier term.

公开(公告)号：US12237083B2

公开(公告)日：2025-02-25

申请号：US17593845

申请日：2021-06-14

Applicant: Bragg Analytics, Inc.

Inventor： Pavel Lazarev ,  Alexander Lazarev

IPC: G16H50/20 ,  A61B5/00 ,  G01N23/20 ,  G01N23/201 ,  G01N33/483 ,  G06F21/60 ,  G06N3/08 ,  G06Q20/08 ,  G06Q20/32 ,  G16H10/40 ,  G16H10/60 ,  G16H30/20 ,  G16H40/63 ,  G16H40/67

Abstract: Provided herein are diffractometer-based global diagnostic systems and uses thereof. The systems may comprise one or more diffraction apparatus operatively coupled to a computer database over a network. The one or more diffraction apparatus may be configured for transfer of data such as pathology lab image data, diffraction pattern data, subject data, or any combination thereof to the computer database over the network. The systems may further comprise one or more computer processors operatively coupled to the one or more diffraction apparatus, which computer processors may be configured to receive the data from the diffraction apparatus, transmit the data to the computer database, and process the data using a data analytics algorithm which may provide a computer-aided diagnostic indicator for the individual subject.

公开(公告)号：US20250060324A1

公开(公告)日：2025-02-20

申请号：US18620332

申请日：2024-03-28

Applicant: Tokyo Electron Limited

Inventor： Francisco Machuca ,  Vi Vuong ,  Andrej Mitrovic ,  Xinkang Tian ,  Holger Tuitje

IPC: G01N23/2206 ,  G01N21/95 ,  G01N23/201 ,  G01N23/223

Abstract: A method of characterizing a device under test (DUT) includes illuminating the DUT with a broadband optical beam within an optical field of view (FOV), illuminating the DUT with an X-ray beam within an X-ray FOV overlapping the optical FOV, and concurrently acquiring X-ray metrology information, e.g., one or more X-ray images utilizing various modalities, such as absorption, phase contrast difference, darkfield, small angle X-ray scattering (SAXS) and/or fluorescence, from the X-ray FOV and a plurality of optical images of the optical FOV, each of the optical images corresponding to respective selected wavelengths of the broadband optical beam from each of ultraviolet, visible, and infrared wavelengths, for example including deep ultraviolet, near infrared, or short-wavelength infrared wavelengths. The DUT may be one or more substrates, e.g., stacked, and include electronic devices such as three-dimensional integrated devices.

公开(公告)号：US20240272098A1

公开(公告)日：2024-08-15

申请号：US18566853

申请日：2022-06-02

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  UNIVERSITE PARIS-SACLAY ,  CY CERGY PARIS UNIVERSITE

Inventor： Hocine KHEMLICHE ,  Anouchah MOMENI ,  Tiberiu MINEA ,  Elena-Magdalena STAICU - CASAGRANDE ,  Sylvain LUPONE

IPC: G01N23/201 ,  C23C14/35 ,  G01N23/2055 ,  G01N23/207

CPC classification number: G01N23/201 ,  C23C14/35 ,  G01N23/2055 ,  G01N23/207

Abstract: A device for characterizing a surface of a sample, including; —a chamber comprising a medium for the sample, the chamber being connected to a pump, referred to as the primary pump, suitable for maintaining a pressure below 10−2 mbar within the chamber; —a source for generating an incident beam of neutral atoms or molecules having an energy of between 50 eV and 5 keV, with a divergence less than or equal to 0.05°, the source being arranged to direct the incident beam within the chamber through an inlet to the surface to be characterized with an angle of incidence less than or equal to 10° relative to the plane of the surface.

公开(公告)号：US20240044819A1

公开(公告)日：2024-02-08

申请号：US18346778

申请日：2023-07-03

Applicant: NOVA LTD.

Inventor： Gilad BARAK

IPC: G01N23/2055 ,  H01L21/66 ,  G06T7/00 ,  G06T5/00 ,  G01N23/201 ,  G01N23/20

CPC classification number: G01N23/2055 ,  H01L22/12 ,  G06T7/0004 ,  G06T5/002 ,  G01N23/201 ,  G01N23/20 ,  G01N2223/6116 ,  G06T2207/30148 ,  G06T2207/20224 ,  G06T2207/10116 ,  G01N2223/401 ,  G01N23/207

Abstract: A method and system are presented for use in X-ray based measurements on patterned structures. The method comprises: processing data indicative of measured signals corresponding to detected radiation response of a patterned structure to incident X-ray radiation, and subtracting from said data an effective measured signals substantially free of background noise, said effective measured signals being formed of radiation components of reflected diffraction orders such that model based interpretation of the effective measured signals enables determination of one or more parameters of the patterned structure, wherein said processing comprises: analyzing the measured signals and extracting therefrom a background signal corresponding to the background noise; and applying a filtering procedure to the measured signals to subtract therefrom signal corresponding to the background signal, resulting in the effective measured signal.

公开(公告)号：US20230375485A1

公开(公告)日：2023-11-23

申请号：US18228024

申请日：2023-07-31

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20025 ,  G01N23/20016

CPC classification number: G01N23/201 ,  G01N23/20025 ,  G01N23/20016 ,  G01N2223/3306 ,  G01N2223/6116 ,  G01N2223/054

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US11781962B2

公开(公告)日：2023-10-10

申请号：US18124703

申请日：2023-03-22

Applicant: China University of Mining and Technology

Inventor： Yang Wang ,  Jie Xiang ,  Shangbin Chen ,  Tong Zhang ,  Qingshun Cao

IPC: G01B13/06 ,  G01N15/08 ,  G01N24/08 ,  G01N33/24 ,  G01N1/28 ,  G01N23/223 ,  G01N23/201

CPC classification number: G01N15/088 ,  G01N1/286 ,  G01N23/201 ,  G01N23/223 ,  G01N24/081 ,  G01N33/24

Abstract: Disclosed is a characterization method of closed pores and connectivity of coal measure composite reservoirs, including collecting samples of coal seams and shales reservoirs, carrying out low-field NMR experiments and NMR freeze-thaw experiments on plunger samples and crushed samples with different particle sizes to obtain cumulative pore volume distribution and differential pore size distribution of the crushed samples, comparing crushed samples with plunger samples for optimal crushed particle sizes, and preliminarily determining a distribution range of closed pores; carrying out SAXS experiments on crushed samples to obtain size distribution and volume of total pores of 1-100 nanometers; calculating pore volume of total pores and closed pore volume in composite reservoirs by low-field NMR experiments results; carrying out non-steady overburden permeability experiments and variable factors on plunger samples of coal seams, shales and tight sandstone to characterize the connectivity under influence of pores development and lithologic combinations.

公开(公告)号：US20230280248A1

公开(公告)日：2023-09-07

申请号：US18106044

申请日：2023-02-06

Applicant: SUMITOMO RUBBER INDUSTRIES, LTD.

Inventor： Tomomi SHIOZAWA

IPC: G01N3/06 ,  G01N3/08 ,  G01N23/201 ,  G01N33/44

CPC classification number: G01N3/06 ,  G01N3/08 ,  G01N23/201 ,  G01N33/445 ,  C08K3/36

Abstract: Provided is an evaluation method that can easily evaluate the percentage of voids in a rubber material. The present disclosure relates to an evaluation method including evaluating the percentage of voids in a rubber material with a strain applied thereto based on the φvoid calculated from the following Equation (1) using the transmittance and thickness of the rubber material with no strain applied thereto and the transmittance and thickness of the rubber material with the strain applied thereto.








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公开(公告)号：US11624718B2

公开(公告)日：2023-04-11

申请号：US15930313

申请日：2020-05-12

Applicant: Alexandra Ros ,  Daihyun Kim ,  Diandra Doppler ,  Jorvani Cruz Villarreal ,  Richard Kirian ,  Reza Nazari ,  Sahir Gandhi

Inventor： Alexandra Ros ,  Daihyun Kim ,  Diandra Doppler ,  Jorvani Cruz Villarreal ,  Richard Kirian ,  Reza Nazari ,  Sahir Gandhi

IPC: B01L3/00 ,  G01N23/20025 ,  G01N23/201 ,  B01L3/02 ,  G01N35/10 ,  G01N23/20

Abstract: A single-piece hybrid droplet generator and nozzle component for serial crystallography. The single-piece hybrid droplet generator component including an internally-formed droplet-generation channel, an internally-formed sample channel, a nozzle, and a pair of electrode chambers. The droplet-generation channel extends from a first fluid inlet opening to the nozzle. The sample channel extends from a second fluid inlet opening to the droplet-generation channel and joins the droplet-generation channel at a junction. The nozzle is configured to eject a stream of segmented aqueous droplets in a carrier fluid from the droplet-generation channel through a nozzle opening of the single-piece component. The pair of electrode chambers are positioned adjacent to the droplet-generation channel near the junction between the droplet-generation channel and the sample channel. The timing of sample droplets in the stream of fluid ejected through the nozzle is controlled by applying a triggering signal to electrodes positioned in the electrode chambers of the single-piece component.

公开(公告)号：US20230075421A1

公开(公告)日：2023-03-09

申请号：US17830389

申请日：2022-06-02

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207

Abstract: An X-ray system includes, first and second X-ray channels (XCs), a spot sizer and a processor. The first XC is configured to: (i) direct a first X-ray beam for producing a spot on a surface of a sample, and (ii) produce a first signal responsively to a first X-ray radiation received from the surface. The spot sizer is positioned at a distance from the surface and is shaped and positioned to set the spot size by passing to the surface a portion of the first X-ray beam. The second XC is configured to: (i) direct a second X-ray beam to the surface, and (ii) produce a second signal responsively to a second X-ray radiation received from the surface, and the processor is configured to: (i) perform an analysis of the sample based on the first signal, and (ii) estimate the size of the spot based on the second signal.