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    Ion source with multiple bias electrodes
    2.
    发明授权
    Ion source with multiple bias electrodes 有权

    公开(公告)号：US11545330B2

    公开(公告)日：2023-01-03

    申请号：US17318325

    申请日：2021-05-12

    Applicant: Axcelis Technologies, Inc.

    Inventor： Wilhelm Platow ,  Paul Silverstein ,  Neil Bassom ,  Marvin Farley ,  David Sporleder

    IPC: H01J27/02 ,  H01J27/08

    Abstract: An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.

    ION SOURCE WITH MULTIPLE BIAS ELECTRODES
    3.
    发明申请
    ION SOURCE WITH MULTIPLE BIAS ELECTRODES 有权

    公开(公告)号：US20220367138A1

    公开(公告)日：2022-11-17

    申请号：US17318325

    申请日：2021-05-12

    Applicant: Axcelis Technologies, Inc.

    Inventor： Wilhelm Platow ,  Paul Silverstein ,  Neil Bassom ,  Marvin Farley ,  David Sporleder

    IPC: H01J27/02 ,  H01J27/08

    Abstract: An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.

    Extended Cathode And Repeller Life By Active Management Of Halogen Cycle
    4.
    发明申请
    Extended Cathode And Repeller Life By Active Management Of Halogen Cycle 有权

    公开(公告)号：US20220359147A1

    公开(公告)日：2022-11-10

    申请号：US17308732

    申请日：2021-05-05

    Applicant: Applied Materials, Inc.

    Inventor： Graham Wright ,  Daniel Alvarado ,  Eric Donald Wilson ,  Robert Lindberg

    IPC: H01J27/08 ,  H01J37/30 ,  H01J27/02 ,  H01J37/08

    Abstract: A system and method for extending the life of a cathode and repeller in an IHC ion source is disclosed. The system monitors the health of the cathode by operating using a known set of parameters and measuring the bias power used to generate the desired extracted beam current or the desired current from the arc voltage power supply. Based on the measured bias power, the system may determine whether the cathode is becoming too thin, and may take a corrective action. This corrective action may be to alert the operator; to operate the IHC ion source using a predetermined set of parameters; or to change the dilution used within the IHC source. By performing these actions, the life of the cathode may be more than doubled.

    IONIC PROPULSION SYSTEM
    5.
    发明申请
    IONIC PROPULSION SYSTEM 有权

    公开(公告)号：US20220063821A1

    公开(公告)日：2022-03-03

    申请号：US17361626

    申请日：2021-06-29

    Applicant: William J. Cass ,  Gregory H. Kurfess

    Inventor： William J. Cass ,  Gregory H. Kurfess

    IPC: B64D27/24 ,  B64C23/00 ,  B64C23/06 ,  F03H1/00 ,  H01J27/08

    Abstract: An ionic propulsion system for an aircraft having an airfoil includes a first conductor and a second conductor, the first conductor and the second conductor being disposed at least partially within the airfoil when not in use. The propulsion system includes an actuator for extending the first conductor and the second conductor from an end of the airfoil such that the first conductor and the second conductor are in the airstream of the aircraft, the first conductor being upstream of the second conductor in the airstream. The propulsion system includes a power supply for supplying current to the first conductor and the second conductor to ionize the air particles in the vicinity of the first conductor and the end of the airfoil to create a flow of the ionized particles from the first conductor toward the second conductor.

    Apparatus and method for ionizing an analyte, and apparatus and method for analysing an ionized analyte
    6.
    发明授权
    Apparatus and method for ionizing an analyte, and apparatus and method for analysing an ionized analyte 有权

    公开(公告)号：US11201045B2

    公开(公告)日：2021-12-14

    申请号：US16622819

    申请日：2018-06-15

    Applicant: PLASMION GMBH

    Inventor： Jan-Christoph Wolf

    IPC: H01J49/10 ,  H01J37/32 ,  H01J49/00 ,  H01J27/08

    Abstract: The present invention discloses an ionization apparatus 10 for ionizing an analyte S, comprising an inlet E, an outlet A, a first electrode 1, a second electrode 2 and a dielectric element 3. The first electrode 1, the second electrode 2 and the dielectric element 3 are arranged relative to one another such that, by applying an electric voltage between the first electrode 1 and the second electrode 2, a dielectric barrier discharge is establishable in a discharge area 5 in the ionization apparatus 10. The first and second electrodes 1, 2 are arranged such that they are displaceable or movable relative to each other.

    Method of extracting and accelerating ions
    7.
    发明授权
    Method of extracting and accelerating ions 有权

    公开(公告)号：US10573499B2

    公开(公告)日：2020-02-25

    申请号：US14975415

    申请日：2015-12-18

    Applicant: AGC Flat Glass North America, Inc. ,  Asahi Glass Co., Ltd. ,  AGC Glass Europe S.A.

    Inventor： John Chambers ,  Peter Maschwitz

    IPC: H01J37/08 ,  H01J37/32 ,  H01J27/08

    Abstract: A method of extracting and accelerating ions is provided. The method includes providing a ion source. The ion source includes a chamber. The ion source further includes a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice and a second hollow cathode having a second hollow cathode cavity and a second plasma exit orifice, the first and second hollow cathodes being disposed adjacently in the chamber. The ion source further includes a first ion accelerator between and in communication with the first plasma exit orifice and the chamber. The first ion accelerator forms a first ion acceleration cavity. The ion source further includes a second ion accelerator between and in communication with the second plasma orifice and the chamber. The second ion accelerator forms a second ion acceleration cavity. The method further includes generating a plasma using the first hollow cathode and the second hollow cathode. The first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counter-electrode. The method further includes extracting and accelerating ions. Each of the first ion acceleration cavity and the second ion acceleration cavity are sufficient to enable the extraction and acceleration of ions.

    Ion source repeller shield comprising a labyrinth seal
    9.
    发明授权
    Ion source repeller shield comprising a labyrinth seal 有权

    公开(公告)号：US10361069B2

    公开(公告)日：2019-07-23

    申请号：US15477680

    申请日：2017-04-03

    Applicant: Axcelis Technologies, Inc.

    Inventor： Neil K. Colvin ,  Tseh-Jen Hsieh ,  Paul B. Silverstein

    IPC: G21F1/06 ,  H01J9/32 ,  H01J37/08 ,  H01J37/32 ,  H01J37/317 ,  H01J27/08 ,  H01J11/28

    Abstract: An arc chamber liner has first and second surfaces and a hole having a first diameter. A liner lip having a second diameter extends upwardly from the second surface toward the first surface and surrounds the hole. An electrode has a shaft with a third diameter and a head with a fourth diameter. The third diameter is less than the first diameter and passes through the body and hole and is electrically isolated from the liner by an annular gap. The head has a third surface having an electrode lip extending downwardly from the third surface toward the second surface. The electrode lip has a fifth diameter between the second and fourth diameters. A spacing between the liner and electrode lips defines a labyrinth seal to generally prevent contaminants from entering the annular gap. The shaft has an annular groove configured to accept a boron nitride seal.

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