Fluorescent excimer lamps
    4.
    发明授权
    Fluorescent excimer lamps 有权
    荧光准分子灯

    公开(公告)号:US08946993B2

    公开(公告)日:2015-02-03

    申请号:US12992185

    申请日:2009-05-15

    CPC classification number: H01J63/02 H01J63/04 H01J63/08

    Abstract: Excimers are formed in a high pressure gas by applying a potential between a first electrode (14, 214) and a counter electrode (25, 226) so as to impose an electric field within the gas, or by introducing high energy electrons into the gas using an electron beam. A phosphor for converting the wavelength of radiation emitted from the formed excimers is disposed within the gas and outside a region (62, 162) where the excimers are expected to be formed, so as to avoid degradation of the phosphor.

    Abstract translation: 通过在第一电极(14,214)和对电极(25,226)之间施加电位以在气体内施加电场,或者通过将高能电子引入到气体中,在高压气体中形成尖峰 使用电子束。 用于将从所形成的激发器发射的辐射的波长转换的荧光体设置在气体内,并且期望形成激发子的区域(62,162)外,以避免荧光体的劣化。

    Laser-driven light source
    5.
    发明授权
    Laser-driven light source 有权
    激光驱动光源

    公开(公告)号:US07989786B2

    公开(公告)日:2011-08-02

    申请号:US12166918

    申请日:2008-07-02

    Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

    Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器,其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

    Light source with laser pumping and method for generating radiation
    8.
    发明授权
    Light source with laser pumping and method for generating radiation 有权
    具有激光泵浦的光源和产生辐射的方法

    公开(公告)号:US09368337B2

    公开(公告)日:2016-06-14

    申请号:US14650657

    申请日:2013-08-23

    Applicant: RND-IS-AN, LTD

    CPC classification number: H01J61/025 H01J61/54 H01J61/76 H01J63/08 H01J65/04

    Abstract: The invention relates to light sources with laser pumping and to methods for generating radiation with a high luminance in the ultraviolet (UV) and visible spectral ranges. The technical result of the invention includes extending the functional possibilities of a light source with laser pumping by virtue of increasing the luminance, increasing the coefficient of absorption of the laser radiation by a plasma, and significantly reducing the numerical aperture of a divergent laser beam which is to be occluded and which is passing through the plasma. The device comprises a chamber containing a gas, a laser producing a laser beam, an optical element, a region of radiating plasma produced in the chamber by the focused laser beam, an occluder, which is mounted on the axis of the divergent laser beam on the second side of the chamber, and an optical system for collecting plasma radiation.

    Abstract translation: 本发明涉及具有激光泵浦的光源以及用于在紫外线(UV)和可见光谱范围内产生具有高亮度的辐射的方法。 本发明的技术结果包括通过增加亮度,增加等离子体激光辐射的吸收系数来扩大激光泵浦的光源的功能可能性,并显着减少发射激光束的数值孔​​径 被封闭并且正在通过等离子体。 该装置包括容纳气体的腔室,产生激光束的激光器,光学元件,通过聚焦激光束在腔室中产生的辐射等离子体的区域,封闭器,其安装在发散激光束的轴上 室的第二侧,以及用于收集等离子体辐射的光学系统。

    Apparatus and method utilizing high power density electron beam for generating pulsed stream of ablation plasma
    9.
    发明授权
    Apparatus and method utilizing high power density electron beam for generating pulsed stream of ablation plasma 有权
    利用高功率密度电子束产生消融等离子体脉冲流的装置和方法

    公开(公告)号:US07557511B2

    公开(公告)日:2009-07-07

    申请号:US11495684

    申请日:2006-07-31

    CPC classification number: H01J37/3233 H01J37/32009

    Abstract: A pulsed electron ablation (PEA) utilizes a source of a high power density electron beam which includes a cathode plasma supplying electrons for generation of the electron beam and an anode plasma having a front layer extending in the processing chamber in a counter relationship with the front layer of the cathode plasma. A gas supply line is coupled to the processing chamber to supply a process gas in a controlled fashion to the anode to create a pressure gradient between the anode and the cathode plasma, and to stimulate an intense ionization of the process gas in the vicinity to the anode to form the anode plasma. The power density of the electron beam sharply increases as the result of an interaction of said cathode and anode plasmas at the double space charge contact layer formed between their fronts. A target is positioned in the processing chamber a predetermined distance from the front layer of the cathode plasma and is exposed to the electron beam to produce stream of the ablation plasma.

    Abstract translation: 脉冲电子消融(PEA)利用高功率密度电子束的源,其包括提供用于产生电子束的电子的阴极等离子体和具有在处理室中延伸的前层的阳极等离子体与前面 阴极等离子体层。 气体供应管线连接到处理室,以可控方式向阳极供应处理气体,以在阳极和阴极等离子体之间产生压力梯度,并且刺激在邻近的处理气体的强电离 阳极形成阳极等离子体。 由于所述阴极和阳极等离子体在其前沿之间形成的双重空间电荷接触层的相互作用的结果,电子束的功率密度急剧增加。 目标物位于处理室中距离阴极等离子体的前层预定的距离,并暴露于电子束以产生消融等离子体的流。

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