公开(公告)号：US20250125139A1

公开(公告)日：2025-04-17

申请号：US18682040

申请日：2022-06-23

Applicant: NEXTIN, INC.

Inventor： Seoung-Ju NA ,  Heung-Gyoon PARK

IPC: H01J65/04 ,  H01J61/02 ,  H01J61/34

Abstract: An apparatus for removing static electricity of a semiconductor substrate, which removes static electricity embedded inside a thin film on the semiconductor substrate by emitting vacuum ultraviolet (VUV) light to the semiconductor substrate disposed inside a vacuum chamber. The apparatus includes: a VUV generator disposed at an upper side of the vacuum chamber and provided with a VUV lamp configured to emit small-area VUV light into an inside of the vacuum chamber; and a light diffusion unit disposed below the VUV generator and configured to diffuse incident VUV light into a wide area and output the diffused VUV light to the semiconductor substrate disposed below the light diffusion unit.

公开(公告)号：US12176200B2

公开(公告)日：2024-12-24

申请号：US18663177

申请日：2024-05-14

Applicant: Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

Inventor： Matthew Partlow ,  Donald K. Smith ,  Matthew Besen ,  Akinori Asai

IPC: H01J65/00 ,  H01J61/16 ,  H01J61/54 ,  H01J65/04 ,  H01S3/06 ,  H01S3/091 ,  H01S3/094 ,  H01S3/1115 ,  H01S3/16 ,  H01S3/13

Abstract: An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

公开(公告)号：US20240297035A1

公开(公告)日：2024-09-05

申请号：US18663177

申请日：2024-05-14

Applicant: Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

Inventor： Matthew Partlow ,  Donald K. Smith ,  Matthew Besen ,  Akinori ASAI

IPC: H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/06 ,  H01S3/091 ,  H01S3/094 ,  H01S3/1115 ,  H01S3/13 ,  H01S3/16

CPC classification number: H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/0602 ,  H01S3/0621 ,  H01S3/0912 ,  H01S3/094038 ,  H01S3/1115 ,  H01S3/1623 ,  H01S3/1643 ,  H01S3/1305

Abstract: An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

公开(公告)号：US12014918B2

公开(公告)日：2024-06-18

申请号：US18465022

申请日：2023-09-11

Applicant: Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

Inventor： Matthew Partlow ,  Donald K. Smith ,  Matthew Besen ,  Akinori Asai

IPC: H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/06 ,  H01S3/091 ,  H01S3/094 ,  H01S3/1115 ,  H01S3/16 ,  H01S3/13

CPC classification number: H01J61/54 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H01S3/0602 ,  H01S3/0621 ,  H01S3/0912 ,  H01S3/094038 ,  H01S3/1115 ,  H01S3/1623 ,  H01S3/1643 ,  H01S3/1305

Abstract: A method of generating light with a laser-driven light source includes generating a CW sustaining light and propagating the CW sustaining light to a gas filled bulb comprising an ionizing gas. A pump light is generated. A Q-switched laser crystal is irradiated with the generated pump light, thereby generating pulsed laser light. The pulsed laser light is propagated to the gas filled bulb comprising the ionizing gas so as to generate a CW plasma that emits light. The light generated by the CW plasma in the gas filled bulb is detected. The pump light is controlled so as to extinguish the pulsed laser light after the light generated by the CW plasma is detected.

公开(公告)号：US20240138048A1

公开(公告)日：2024-04-25

申请号：US18535840

申请日：2023-12-11

Applicant: KLA Corporation

Inventor： John Szilagyi ,  Ilya Bezel

IPC: H05H1/46 ,  C01B13/10 ,  H01J65/04 ,  H05G2/00

CPC classification number: H05H1/46 ,  C01B13/10 ,  H01J65/04 ,  H05G2/008

Abstract: An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.

公开(公告)号：US11769657B2

公开(公告)日：2023-09-26

申请号：US17371574

申请日：2021-07-09

Applicant: B/E AEROSPACE, INC.

Inventor： Eric Johannessen ,  Jeremy Fredrich

IPC: H05B41/14 ,  H01J65/04

CPC classification number: H01J65/042 ,  H05B41/14

Abstract: A system for powering an excimer bulb includes a first inductor configured to be coupled to a first terminal of the excimer bulb. The system further includes a first transistor coupled to the first inductor and having an on state configured to allow current to flow through the first inductor and an off state. The system further includes a second transistor configured to be coupled to the first terminal of the excimer bulb and having an on state configured to allow current to flow through the excimer bulb and an off state. The system further includes a controller coupled to the first transistor and the second transistor, and to control operation of the first transistor and the second transistor to power the excimer bulb.

公开(公告)号：US20230274927A1

公开(公告)日：2023-08-31

申请号：US18012146

申请日：2021-06-21

Applicant: Pierre F THIBAULT

Inventor： Pierre F THIBAULT

IPC: H01J65/04 ,  H01J61/34

CPC classification number: H01J65/048 ,  H01J61/34

Abstract: A closed loop tubular discharge assembly for an electrodeless light-emitting device and discharge reactor is disclosed. The discharge assembly comprises one or more tubular segments tubularly connected at their respective ends to form the closed loop tubular assembly, which hermetically encloses an ionizable gas. At least one of the one or more tubular segments forms a non-cylindrical, hollow-shaped tubular segment. In one embodiment, the non-cylindrical, hollow-shaped segment is formed by an internal tube at least partially enclosed within an external tube, forming a hollow-shaped discharge envelope enclosing the ionizable gas there between. When a discharge current circulates in the ionizable gas of the envelope, a hollow-shaped plasma is created in the envelope and surrounds the internal tube. This design has been shown to increase performance and provide several improvements over prior art devices.

公开(公告)号：US11676809B2

公开(公告)日：2023-06-13

申请号：US17956294

申请日：2022-09-29

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akio Suzuki ,  Toru Fujita ,  Shinichi Ohba ,  Akinori Asai ,  Tomoya Nakazawa ,  Taiga Morimoto

IPC: H01J65/04 ,  H01J61/30 ,  H01J61/35

CPC classification number: H01J61/302 ,  H01J61/35 ,  H01J65/04

Abstract: A light emitting sealed body includes: a housing containing light-emitting gas in an internal space and formed with an opening on which first light is incident and/or from which second light is emitted, wherein the first light is laser light for maintaining a plasma generated in the light-emitting gas and the second light is light from the plasma; and a window member that transmits the first light and/or the second light at the opening. The window member is joined to the housing by a joining material consisting of a material containing gold.

公开(公告)号：US20230178357A1

公开(公告)日：2023-06-08

申请号：US18161282

申请日：2023-01-30

Applicant: Hamamatsu Photonics K.K. ,  ENERGETIQ TECHNOLOGY, INC.

Inventor： Matthew Partlow ,  Donald Smith ,  Matthew Besen ,  Akinori Asai

IPC: H01J61/54 ,  H01S3/1115 ,  H01S3/094 ,  H01J65/00 ,  H01S3/091 ,  H01S3/16 ,  H01S3/06 ,  H01J61/16 ,  H01J65/04

CPC classification number: H01J61/54 ,  H01S3/1115 ,  H01S3/094038 ,  H01J65/00 ,  H01S3/0912 ,  H01S3/1623 ,  H01S3/1643 ,  H01S3/0602 ,  H01S3/0621 ,  H01J61/16 ,  H01J65/04 ,  H01S3/1305

Abstract: An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

公开(公告)号：US11664211B2

公开(公告)日：2023-05-30

申请号：US17956186

申请日：2022-09-29

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akio Suzuki ,  Toru Fujita ,  Shinichi Ohba ,  Akinori Asai ,  Tomoya Nakazawa ,  Taiga Morimoto

IPC: H01J61/26 ,  H01J65/04 ,  H01J61/16 ,  H01J61/12

CPC classification number: H01J61/26 ,  H01J61/16 ,  H01J65/042 ,  H01J61/12

Abstract: A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion which is provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; a second window portion provided to the housing and from which second light that is light from the plasma is emitted; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing.