Invention Patent
- Patent Title: OSCILLATING QUARTZ ATOMIC FORCE MICROSCOPE
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Application No.: CA565615Application Date: 1988-04-29
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Publication No.: CA1330452CPublication Date: 1994-06-28
- Inventor: POHL WOLFGANG D
- Applicant: IBM
- Assignee: IBM
- Current Assignee: IBM
- Priority: EP87106899 1987-05-12
- Main IPC: G01B7/34
- IPC: G01B7/34 ; G01B21/30 ; G01L1/08 ; G01L1/16 ; G01N23/00 ; G01N37/00 ; G01Q10/06 ; G01Q20/04 ; G01Q60/32 ; G01Q60/38 ; H01J37/26
Abstract:
This atomic force microscope comprises a pointed tip (1) mounted on top of an oscillating crystal (2) which is translatable In xyz-directions by a conventional xyz-drive (4). A potential applied to a pair of electrodes (5, 6) coated on opposite faces of said crystal (2) causes the latter to oscillate with its resonance frequency. As the tip (1) is approached to a surface to be investigated, the frequency of oscillation of the crystal deviates from its original frequency. This deviation can be used in a feedback loop to control thedistance in z-direction of the tip (1) from the surface being investigated and to plot an image of the contour of each scan performed by the tip (1) across the surface.
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