Invention Patent
- Patent Title: PROCESS FOR MANUFACTURING INTEGRATED OPTICAL COMPONENTS USING SILICON MASK
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Application No.: CA2077984Application Date: 1992-09-10
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Publication No.: CA2077984A1Publication Date: 1993-03-28
- Inventor: BEGUIN ALAIN , PRESOTTO JEAN-CLAUDE , LABORDE PASCALE
- Applicant: CORNING INC
- Assignee: CORNING INC
- Current Assignee: CORNING INC
- Priority: FR9111923 1991-09-27
- Main IPC: C03C17/22
- IPC: C03C17/22 ; C03C21/00 ; G02B6/12 ; G02B6/13 ; G02B6/134 ; H01L21/228 ; C23F1/24 ; H01L21/302
Abstract:
A process for the production of an integrated optical circuit in a glass body by ion exchange between certain regions of the glass body and a metallic salt with the use of a mask defining the regions where the ion exchange occurs, characterized in that the mask comprises a layer of silicon. Optical application
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