Invention Patent
- Patent Title: LIGAND STABILIZED +1 METAL BETA-DIKETONATE COORDINATION COMPLEXES AND THEIR USE IN CHEMICAL VAPOR DEPOSITION OF METAL FILMS
-
Application No.: CA2090038Application Date: 1991-01-23
-
Publication No.: CA2090038A1Publication Date: 1992-04-25
- Inventor: BAUM THOMAS H , LARSON CARL E , REYNOLDS SCOTT K
- Applicant: IBM
- Assignee: IBM
- Current Assignee: IBM
- Priority: US60297090 1990-10-24
- Main IPC: C07F1/08
- IPC: C07F1/08 ; C07F1/10 ; C07F9/02 ; C07F9/50 ; C07F15/00 ; C23C16/18 ; C23C16/48 ; C23C16/50 ; H01L21/285 ; H05K3/40 ; C07F1/00 ; B05D3/00 ; C23C4/02 ; B01J19/12
Abstract:
2090038 9207971 PCTABS00013 Chemical vapor deposition precursors for depositing copper, silver, rhodium and iridium metals on substrates comprise ligand stabilized +1 metal beta-diketonate coordination complexes of said metals. Uses of such precursors in CVD processes are also provided.
Information query
