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Invention Publication
CN104995719A 具有可拆卸式气体分配板的喷淋头 有权

具有可拆卸式气体分配板的喷淋头
Abstract:
本发明提供具有可拆卸式气体分配板的喷淋头的实施例。在一些实施例中，一种使用于半导体处理腔室的喷淋头可包括：基座，该基座具有第一侧与第二侧；气体分配板，该气体分配板设置成邻近于该基座的该第二侧；及夹具，该夹具设置于接近该气体分配板的周围边缘以将该气体分配板以可移除方式耦接于该基座；以及热垫片，该热垫片设置于该基座与该气体分配板之间。
Abstract(English):

Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side; a gas distribution plate disposed proximate the second side of the base; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed between the base and gas distribution plate.

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