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Invention Grant
CN106483769B 稀释剂组合物 有权

稀释剂组合物
Abstract:
一种稀释剂组合物，包括：丙二醇烷基醚乙酸酯、环酮和甲基2‑羟基异丁酸酯。所述稀释剂组合物具有优异的EBR、RRC和再加工性能以及改善光致抗蚀剂涂覆均匀性的效果，特别地，对具有高极性的光致抗蚀剂表现出优异的溶解性，以可应用于各种光致抗蚀剂。
Abstract(English):

A thinner composition includes propyleneglycol alkylether acetate, cycloketone, and methyl 2-hydroxy isobutyrate. The thinner composition has excellent EBR, RRC, and rework properties, as well as effects of improving photoresist application uniformity, and in particular, exhibiting excellent solubility to photoresist having a high polarity, so as to be applicable to various photoresists.

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