The invention discloses a method of aluminum film technology. The method is applicable to aluminum films which are not smaller than the 12000 in thickness. Polymers are removed with the removal of metal films, and the residual polymers are further completely removed by wet etching and dry etching. The removal of the metal films is conducted by adoption of oxygen flows and water peeling. The method removes the polymers with the removal of the metal films and further completely removes the residual polymers by wet etching and dry etching, and is capable of completely removing the polymers and increasing etching windows for subsequent process.