The invention provides an inspecting apparatus, a decompression drying apparatus and a control method of the decompression drying apparatus, being capable of detecting a dry condition in a coated region being coated with an organic material on a substrate at an early stage. The inspecting apparatus includes an imaging section and a dry-condition detection section. The imaging section images a coated region where an organic material is coated on a substrate. The dry-condition detection section detects a dry condition of the coated region on the basis of the color density in the coated region imaged by the imaging section.