A cartridge type two-dimensional servo valve with a temperature compensation type damping piston comprises a valve body module, an electric-mechanical converter module and a position sensor module. The valve body module comprises a two-dimensional valve composed of a valve element and a valve sleeve, and the valve element is rotatably placed in a hole in the valve sleeve in an axially sliding mode. The valve element 30 is provided with five shoulders, the right end of the valve sleeve is connected with the electric-mechanical converter module through a connecting plate, the valve element is fixedly connected with an armature, and the right end of the valve element is connected with the electric-mechanical converter module through the armature. The damping piston is arranged on the right surface of the fourth shoulder, and a damping cavity f is organically formed by the left side of the damping piston, the valve sleeve and the valve element in an enclosed mode. The right side of the damping piston is exposed to a high pressure hole b. A gap is formed between the damping piston and the valve sleeve. A torque motor is adopted for the electric-mechanical converter module, one end of aspring is connected with a spring rod, and the other end of the spring is connected with a spring seat fixed to an outer shell. The displacement sensor module comprises an LVDT connecting rod and an LVDT sensor.