The invention relates to the technical field of lasers, in particular to a hardware interlock control system based on an excimer laser and a method thereof. A hardware interlock management unit receives a cavity switch signal sent by a sensor and a control signal sent by a lithography machine, the hardware interlock management unit sends a channel switch signal to a power distribution management unit and sends an interlock signal to a main controller at the same time, the main controller performs interlock signal logic processing, the hardware interlock management unit is integrated, the interlock information is added to be transmitted to the laser through a CAN interface, the laser operation safety is improved, and the device and the personal safety can be effectively protected.