Invention Patent
- Patent Title: Improved-reliability damascene interconnects and process of manufacture.
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Application No.: HK01106779Application Date: 2001-09-26
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Publication No.: HK1036150A1Publication Date: 2001-12-21
- Inventor: CLEVENGER LARRY , FILIPPI RONALD G , GAMBINO JEFFREY , GIGNAC LYNNE , HURD JEFFERY L , HOINKIS MARK , IGGULDEN ROY C , MEHTER EBRAHIM , RODBELL KENNETH P , SCHNABEL FLORIAN , WEBER STEFAN J
- Applicant: IBM , SIEMENS AG
- Assignee: IBM,SIEMENS AG
- Current Assignee: IBM,SIEMENS AG
- Priority: HK01106779 2001-09-26
- Main IPC: H01L
- IPC: H01L20060101 ; H01L
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