Invention Patent
- Patent Title: PROCESSO PER LA FORMAZIONE DI STRUTTURE DI ISOLAMENTO A
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Application No.: ITRM20030255Application Date: 2003-05-26
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Publication No.: ITRM20030255A1Publication Date: 2004-11-27
- Inventor: BEGHIN LORENA KATIA , MARIANI MARCELLO , PICCOLO DONATA , SAVARDI CHIARA
- Applicant: ST MICROELECTRONICS SRL
- Assignee: ST MICROELECTRONICS SRL
- Current Assignee: ST MICROELECTRONICS SRL
- Priority: ITRM20030255 2003-05-26
- Main IPC: H01L
- IPC: H01L20060101 ; H01L21/762
Public/Granted literature
- ITRM20030255D0 Public/Granted day:2003-05-26
Information query