Invention Patent
- Patent Title: Metrology apparatus, lithographic apparatus and method of measuring a property of a substrate.
-
Application No.: NL1036331Application Date: 2008-12-18
-
Publication No.: NL1036331A1Publication Date: 2009-06-30
- Inventor: MAST KAREL DIEDERICK VAN DER , ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES VAN , BOEF ARIE JEFFREY DEN , KERKHOF MARCUS ADRIANUS VAN DE
- Applicant: ASML NETHERLANDS BV
- Assignee: ASML NETHERLANDS BV
- Current Assignee: ASML NETHERLANDS BV
- Priority: US919207 2007-12-27
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01B9/02 ; G03F7/20
Information query
