- Patent Title: Immersion lithographic apparatus and device manufacturing method
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Application No.: US15328376Application Date: 2015-06-26
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Publication No.: US10001712B2Publication Date: 2018-06-19
- Inventor: Theodorus Wilhelmus Polet , Johannes Jacobus Matheus Baselmans , Willem Jan Bouman , Han Henricus Aldegonda Lempens , Theodorus Marinus Modderman , Cornelius Maria Rops , Bart Smeets , Koen Steffens , Ronald Van Der Ham
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP14178480 20140725; EP15161938 20150331
- International Application: PCT/EP2015/064500 WO 20150626
- International Announcement: WO2016/012193 WO 20160128
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20

Abstract:
An immersion lithographic apparatus includes a projection system. The projection system is configured to project a patterned radiation beam through an immersion liquid onto a target portion of a substrate. An external surface of the projection system includes a first surface. The first surface has a non-planar shape. An element is attached to the first surface and positioned so that at least a portion of the element contacts the immersion liquid in use. The element includes a closed loop of continuously integral material in a preformed state and conforms to the non-planar shape of the first surface.
Public/Granted literature
- US20170219939A1 IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2017-08-03
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